Ammonia sensing characteristics of sputtered indium tin oxide (ITO) thin films on quartz and sapphire substrates

IEEE Transactions on Electron Devices

Volumn 58, Issue 12, 2011, Pages 4407-4413

  Lin, Cheng Wei ^a   Chen, Huey Ing ^a   Chen, Tai You ^a   Huang, Chien Chang ^a   Hsu, Chi Shiang ^a   Liu, Wen Chau ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Ammonia sensor; crystalline; grain size; indium tin oxide (ITO); oxygen deficiency; radio frequency sputtering

Indexed keywords

AMMONIA SENSORS; GRAIN SIZE; INDIUM TIN OXIDE (ITO); OXYGEN DEFICIENCY; RADIO FREQUENCY SPUTTERING;

AMMONIA; CRYSTALLINE MATERIALS; INDIUM; INDIUM COMPOUNDS; OXIDE FILMS; QUARTZ; SAPPHIRE; SENSORS; THIN FILMS; TIN; TIN OXIDES; TINNING;

SUBSTRATES;

EID: 82155172893     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2011.2167234     Document Type: Article

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