Nano-grained thin-film indium tin oxide gas sensors for H2 detection

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 159-164

  Yoo, Kwang Soo ^a   Park, Sang Hyoun ^a   Kang, Ju Hyun ^a  

^a University of Seoul   (South Korea)

Author keywords

H2 sensors; Indium tin oxides (ITO) thin films; Thin film gas sensors

Indexed keywords

ALUMINA; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; HYDROGEN; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

GAS DETECTION SENSORS; H2 SENSORS; INDIUM TIN OXIDE (ITO) THIN FILMS; THIN-FILM GAS SENSORS;

CHEMICAL SENSORS;

EID: 19744370050     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.12.105     Document Type: Conference Paper

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