On an indium-tin-oxide thin film based ammonia gas sensor

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 1481-1484

  Lin, Cheng Wei ^a   Chen, Huey Ing ^a   Chen, Tai You ^a   Huang, Chien Chang ^a   Hsu, Chi Shiang ^a   Liu, Rong Chau ^b   Liu, Wen Chau ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Ammonia sensor; Grain size; ITO; Oxygen deficiency; RF sputtering

Indexed keywords

AMMONIA SENSORS; GRAIN SIZE; ITO; OXYGEN DEFICIENCY; RF SPUTTERING;

AMMONIA; INDIUM COMPOUNDS; QUARTZ; SENSORS; THIN FILMS; TIN; TIN OXIDES;

INDIUM;

EID: 81155133895     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.07.041     Document Type: Article

References (24)

1. C.H. Xu, S.Q. Shi, and C. Surya Gas sensors based on one-dimensional nanostructures Sensors 9 2008 9903 9924
2. S.Y. Chiu, H.W. Huang, T.H. Huang, K.C. Liang, K.P. Liu, J.H. Tsai, and W.S. Lour Comprehensive investigation on planar type of Pd-GaN hydrogen sensors Int. J. Hydrogen Energy 34 2009 5604 5615
3. 2 atmospheres Sens. Actuators B-Chem. 123 2007 1040 1048
4. C.S. Rout, M. Hegde, A. Govindaraj, and C.N.R. Rao Ammonia sensors based on metal oxide nanostructure Nanotechnology 18 2007 205504
5. P. Gruendler Chemical Sensors 2007 Springer Berlin (Chapter 1), p. 9
6. B. Timmer, W. Olthuis, and A. van den Berg Ammonia sensors and their applications-a review Sens. Actuators B-Chem. 107 2005 666 677
7. B. Carrico, J. Saredy, J.L. Tracy, N.G. Patel, J. Garner, and L. Gasparov Measurement of the dc resistance of semiconductor thin film-gas systems: Comparison to several transport models J. Appl. Phys. 102 2007 083714
8. N.G. Patel, P.D. Patel, and V.S. Vaishnav Indium tin oxide (ITO) thin film gas sensor for detection of methanol at room temperature Sens. Actuators B-Chem. 96 2003 180 189
9. V.S. Vaishnav, P.D. Patel, and N.G. Patel Indium tin oxide thin film gas sensors for detection of ethanol vapours Thin Solid Films 490 2005 94 100
10. V.S. Vaishnav, P.D. Patel, and N.G. Patel Preparation and characterization of indium tin oxide thin films for their application as gas sensors Thin Solid Films 487 2005 277 282
11. N.G. Patel, K.K. Makhija, C.J. Panchal, D.B. Dave, and V.S. Vaishnav Fabrication of carbon tetrachloride gas sensors using indium tin oxide thin films Sens. Actuators B-Chem. 23 1995 49 53
12. N.G. Patel, K.K. Makhija, and C.J. Panchal Fabrication of carbon dioxide gas sensor and its alarm system using indium tin oxide (ITO) thin films Sens. Actuators B-Chem. 21 1994 193 197
13. E. Aperathitis, M. Bender, V. Cimalla, G. Ecke, and M. Modreanu Properties of rf-sputtered indium-tin-oxynitride thin films J. Appl. Phys. 94 2003 1258
14. Z. Jiao, M. Wu, J. Gu, and X. Sun The gas sensing characteristics of ITO thin film Sens. Actuators B-Chem. 94 2003 216 221
15. 3 gas sensing Mater. Sci. Eng. C-Biomimetic Supramol. Syst. 26 2006 500 504
16. 2, and hydrocarbon sensing IEEE Sens. J. 7 2007 919 924
17. N. Boonyopakorn, N. Sripongpun, C. Thanachayanont, and S. Dangtip Effects of substrate temperature and vacuum annealing on properties of ITO films prepared by radio-frquency magnetron sputtering Chin. Phys. Lett. 27 2010 108103
18. Y.S. Jung, D.W. Lee, and D.Y. Jeon Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films Appl. Surf. Sci. 221 2004 136 142
19. 3 films deposited at various substrate temperatures Thin Solid Films 516 2008 5868 5871
20. J.H. Lee Effects of substrate temperature on electrical and optical properties ITO films deposited by r.f. magnetron sputtering J. Electroceram. 23 2009 554
21. H. Kim, J.S. Horwitz, G. Kushto, A. Pique, Z.H. Kafafi, C.M. Gilmore, and D.B. Chrisey Effect of film thickness on the properties of indium tin oxide thin films J. Appl. Phys. 88 2000 6021 6025
22. V.S. Reddy, K. Das, A. Dhar, and S.K. Ray Semicond. The effect of substrate temperature on the properties of ITO thin films for OLED applications Sci. Technol. 21 2006 1747 1752
23. J.X. Wang, X.W. Sun, Y. Yang, H. Huang, Y.C. Lee, O.K. Tan, and L. Vayssiers Hydrothermally grown oriented ZnO nanorod arrays for gas sensing applications Nanotechnology 17 2006 4995 4998
24. J. Li, H. Fan, and X. Jia Multilayered ZnO nanosheets with 3D porous architectures synthesis and gas sensing application J. Phys. Chem. C 114 2010 14684 21491