SCOPUS 정보 검색 플랫폼

European Physical Journal D

Volumn 64, Issue 2-3, 2011, Pages 437-445

Influence of plasma chemistry on oxygen triplets

(3) Milosavljevic V a,b Ellingboe, A R a Daniels, S a

a DUBLIN CITY UNIVERSITY (Ireland)

b UNIVERSITY OF BELGRADE (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; ELECTRIC DISCHARGES; ENERGY TRANSFER; ETCHING;

DIELECTRIC ETCHING; EMISSION INTENSITY; LOW PRESSURE PLASMA; OPERATIONAL CONDITIONS; PLASMA CHEMISTRIES; RELATIVE INTENSITY; RESONANT ENERGY TRANSFER; SEMICONDUCTOR DIELECTRICS;

OXYGEN;

EID: 80755123310 PISSN: 14346060 EISSN: 14346079 Source Type: Journal
DOI: 10.1140/epjd/e2011-20213-2 Document Type: Article

Times cited : (21)

References (26)

1
- 67349157046
- 2009EPJD.52.11V 10.1140/epjd/e2009-00024-x
- K. von Haeften C. Binns A. Brewer O. Crisan P.B. Howes M.P. Lowe C. Sibbley-Allen S.C. Thornton 2009 Eur. Phys. J. D 52 11 2009EPJD...52...11V 10.1140/epjd/e2009-00024-x
- (2009) Eur. Phys. J. D , vol.52 , pp. 11
- Von Haeften, K.¹ Binns, C.² Brewer, A.³ Crisan, O.⁴ Howes, P.B.⁵ Lowe, M.P.⁶ Sibbley-Allen, C.⁷ Thornton, S.C.⁸

2
- 68549111261
- 2009EPJD.54.211S 10.1140/epjd/e2009-00048-2
- J. Schäfer R. Foest A. Quade A. Ohl J. Meichsner K.D. Weltmann 2009 Eur. Phys. J. D 54 211 2009EPJD...54..211S 10.1140/epjd/e2009-00048-2
- (2009) Eur. Phys. J. D , vol.54 , pp. 211
- Schäfer, J.¹ Foest, R.² Quade, A.³ Ohl, A.⁴ Meichsner, J.⁵ Weltmann, K.D.⁶

3
- 68549122903
- 2009EPJD.54.195M 10.1140/epjd/e2009-00035-7
- Z. Machala I. Jedlovský L. Chládeková B. Pongrác D. Giertl M. Janda L. Šikurová P. Polčic 2009 Eur. Phys. J. D 54 195 2009EPJD...54..195M 10.1140/epjd/e2009-00035-7
- (2009) Eur. Phys. J. D , vol.54 , pp. 195
- MacHala, Z.¹ Jedlovský, I.² Chládeková, L.³ Pongrác, B.⁴ Giertl, D.⁵ Janda, M.⁶ Šikurová, L.⁷ Polčic, P.⁸

4
- 36749011272
- 2007EPJD.45.501G 10.1140/epjd/e2007-00211-9
- S. Gilb K. Hartl A. Kartouzian J. Peter U. Heiz H.-G. Boyen P. Ziemann 2007 Eur. Phys. J. D 45 501 2007EPJD...45..501G 10.1140/epjd/e2007-00211-9
- (2007) Eur. Phys. J. D , vol.45 , pp. 501
- Gilb, S.¹ Hartl, K.² Kartouzian, A.³ Peter, J.⁴ Heiz, U.⁵ Boyen, H.-G.⁶ Ziemann, P.⁷

5
- 68549088923
- 2009EPJD.54.165G 10.1140/epjd/e2009-00117-6
- E. Grimoldi S. Zanini R.A. Siliprandi C. Riccardi 2009 Eur. Phys. J. D 54 165 2009EPJD...54..165G 10.1140/epjd/e2009-00117-6
- (2009) Eur. Phys. J. D , vol.54 , pp. 165
- Grimoldi, E.¹ Zanini, S.² Siliprandi, R.A.³ Riccardi, C.⁴

6
- 4544286823
- 2004AcSpe.59.1423M 10.1016/j.sab.2004.07.003
- V. Milosavljević V. Žigman S. Djeniže 2004 Spectrochim. Acta Part B: At. Spectrosc. 59 1423 2004AcSpe..59.1423M 10.1016/j.sab.2004.07.003
- (2004) Spectrochim. Acta Part B: At. Spectrosc. , vol.59 , pp. 1423
- Milosavljević, V.¹ Žigman, V.² Djeniže, S.³

7
- 32444448776
- Measured Stark widths and shifts of the neutral argon spectral lines in 4s-4p and 4s-4p′ transitions
- DOI 10.1016/j.sab.2005.11.004, PII S0584854705003332
- V. Milosavljević A.R. Ellingboe S. Djeniže 2006 Spectrochim. Acta Part B: At. Spectrosc. 61 81 2006AcSpe..61...81M 10.1016/j.sab.2005.11.004 (Pubitemid 43224136)
- (2006) Spectrochimica Acta - Part B Atomic Spectroscopy , vol.61 , Issue.1 , pp. 81-87
- Milosavljevic, V.¹ Ellingboe, A.R.² Djenize, S.³

8
- 0019021889
- Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
- DOI 10.1063/1.328060
- J.W. Coburn M. Chen 1980 J. Appl. Phys. 51 3134 1980JAP....51.3134C 10.1063/1.328060 (Pubitemid 11441215)
- (1980) Journal of Applied Physics , vol.51 , Issue.6 , pp. 3134-3136
- Coburn, J.W.¹ Chen, M.²

9
- 36549094168
- 1986JChPh.84.2668W 10.1063/1.450339
- R.E. Walkup K.L. Saenger G.S. Selwyn 1986 J. Chem. Phys. 84 2668 1986JChPh..84.2668W 10.1063/1.450339
- (1986) J. Chem. Phys. , vol.84 , pp. 2668
- Walkup, R.E.¹ Saenger, K.L.² Selwyn, G.S.³

10
- 80755164900
- edited by K. Akashi, A. Kinbara (Tokyo
- S. De Benedictis, A. Gicquel, F. Cramarossa, Proc. 8th Int. Symp. Plasma Chem. ISPC'87, edited by K. Akashi, A. Kinbara (Tokyo, 1987)
- (1987) Proc. 8th Int. Symp. Plasma Chem. ISPC'87
- De Benedictis, S.¹ Gicquel, A.² Cramarossa, F.³

11
- 2942567838
- 2004PSST.13.251M 10.1088/0963-0252/13/2/009
- P. Macko P. Veis G. Cernogora 2004 Plasma Source. Sci. Technol. 13 251 2004PSST...13..251M 10.1088/0963-0252/13/2/009
- (2004) Plasma Source. Sci. Technol. , vol.13 , pp. 251
- MacKo, P.¹ Veis, P.² Cernogora, G.³

12
- 29144468977
- Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry
- DOI 10.1088/0022-3727/38/24/003, PII S0022372705069688
- T. Czerwiec F. Greer D.B. Graves 2005 J. Phys. D 38 4278 2005JPhD...38.4278C 10.1088/0022-3727/38/24/003 (Pubitemid 41793963)
- (2005) Journal of Physics D: Applied Physics , vol.38 , Issue.24 , pp. 4278-4289
- Czerwiec, T.¹ Greer, F.² Graves, D.B.³

13
- 80755147997
- NIST - Atomic Spectra Data Base Lines (wavelength order) (2011), http://physics.nist.gov
- (2011) NIST - Atomic Spectra Data Base Lines (Wavelength Order)

14
- 0003730831
- Wiley, New York
- M. Lieberman, A. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994)
- (1994) Principles of Plasma Discharges and Materials Processing
- Lieberman, M.¹ Lichtenberg, A.²

15
- 0001615991
- 1990JaJAP.29.2165F 10.1143/JJAP.29.2165
- S. Fujimura K. Shinagawa M. Nakamura H. Yano 1990 Jpn J. Appl. Phys. 29 2165 1990JaJAP..29.2165F 10.1143/JJAP.29.2165
- (1990) Jpn J. Appl. Phys. , vol.29 , pp. 2165
- Fujimura, S.¹ Shinagawa, K.² Nakamura, M.³ Yano, H.⁴

16
- 36449003244
- 1994JAP.75.104G 10.1063/1.355897
- A. Granier D. Chéreau K. Henda R. Safari P. Leprince 1994 J. Appl. Phys. 75 104 1994JAP....75..104G 10.1063/1.355897
- (1994) J. Appl. Phys. , vol.75 , pp. 104
- Granier, A.¹ Chéreau, D.² Henda, K.³ Safari, R.⁴ Leprince, P.⁵

17
- 34247519620
- Dublin City University, Dublin
- V. Milosavljević, PRL Internal report, Dublin City University, Dublin, 2004
- (2004) PRL Internal Report
- Milosavljević, V.¹

18
- 35449006732
- Real time sensor for monitoring oxygen in radio-frequency plasma applications
- DOI 10.1364/OE.15.013913
- V. Milosavljević R. Faulkner M.B. Hopkins 2007 Optics Express 15 13913 2007OExpr..1513913M 10.1364/OE.15.013913 (Pubitemid 47616097)
- (2007) Optics Express , vol.15 , Issue.21 , pp. 13913-13923
- Milosavyevic, V.¹ Faulkner, R.² Hopkins, M.B.³

19
- 36649006880
- Practical sensor for nitrogen in direct current glow discharges
- DOI 10.1063/1.2816254
- D. Popović V. Milosavljević S. Daniels 2007 J. Appl. Phys. 102 103303 2007JAP...102j3303P 10.1063/1.2816254 (Pubitemid 350198082)
- (2007) Journal of Applied Physics , vol.102 , Issue.10 , pp. 103303
- Popovic, D.¹ Milosavljevic, V.² Daniels, S.³

20
- 0042266887
- 2003RScI.74.3453N 10.1063/1.1582386
- H. Nagai M. Hiramatsu M. Hori T. Goto 2003 Rev. Sci. Instrum. 74 3453 2003RScI...74.3453N 10.1063/1.1582386
- (2003) Rev. Sci. Instrum. , vol.74 , pp. 3453
- Nagai, H.¹ Hiramatsu, M.² Hori, M.³ Goto, T.⁴

21
- 43049151474
- Real-time plasma control in a dual-frequency, confined plasma etcher
- DOI 10.1063/1.2903137
- V. Milosavljević A.R. Ellingboe C. Gaman 2008 J. Appl. Phys. 103 083302 2008JAP...103h3302M 10.1063/1.2903137 (Pubitemid 351623518)
- (2008) Journal of Applied Physics , vol.103 , Issue.8 , pp. 083302
- Milosavljevic, V.¹ Ellingboe, A.R.² Gaman, C.³ Ringwood, J.V.⁴

22
- 50249185235
- 2008ApPhL.93g1501K 10.1063/1.2971236
- S.K. Karkari A.R. Ellingboe C. Gaman 2008 Appl. Phys. Lett. 93 071501 2008ApPhL..93g1501K 10.1063/1.2971236
- (2008) Appl. Phys. Lett. , vol.93 , pp. 071501
- Karkari, S.K.¹ Ellingboe, A.R.² Gaman, C.³

23
- 0041733196
- 2003JPhD.36.1810R 10.1088/0022-3727/36/15/311
- J. Robiche P.C. Boyle M.M. Turner A.R. Ellingboe 2003 J. Phys. D 36 1810 2003JPhD...36.1810R 10.1088/0022-3727/36/15/311
- (2003) J. Phys. D , vol.36 , pp. 1810
- Robiche, J.¹ Boyle, P.C.² Turner, M.M.³ Ellingboe, A.R.⁴

24
- 33644924060
- 2006ApPhL.88j1501K 10.1063/1.2182073
- S.K. Karkari A.R. Ellingboe 2006 Appl. Phys. Lett. 88 101501 2006ApPhL..88j1501K 10.1063/1.2182073
- (2006) Appl. Phys. Lett. , vol.88 , pp. 101501
- Karkari, S.K.¹ Ellingboe, A.R.²

25
- 1642603423
- 2004JPhD.37.697B 10.1088/0022-3727/37/5/008
- P.C. Boyle A.R. Ellingboe M.M. Turner 2004 J. Phys. D 37 697 2004JPhD...37..697B 10.1088/0022-3727/37/5/008
- (2004) J. Phys. D , vol.37 , pp. 697
- Boyle, P.C.¹ Ellingboe, A.R.² Turner, M.M.³

26
- 36448979252
- Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge
- DOI 10.1088/0022-3727/40/22/022, PII S0022372707522795
- J. Schulze T. Gans D. O'Connell U. Czarnetzki A.R. Ellingboe M.M. Turner 2007 J. Phys. D 40 7008 2007JPhD...40.7008S 10.1088/0022-3727/40/22/022 (Pubitemid 350163944)
- (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.22 , pp. 7008-7018
- Schulze, J.¹ Gans, T.² O'Connell, D.³ Czarnetzki, U.⁴ Ellingboe, A.R.⁵ Turner, M.M.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.