Real time sensor for monitoring oxygen in radio-frequency plasma applications

Optics Express

Volumn 15, Issue 21, 2007, Pages 13913-13923

  Milosavyevic V ^a,b   Faulkner, R ^a   Hopkins, M B ^a  

^a National Centre for Plasma Science and Technology (NCPST)   (Ireland)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; DENSITY (SPECIFIC GRAVITY); OXYGEN; PLASMAS; REAL TIME SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE; SPECTROMETERS;

BUFFER GAS (ARGON) ACTINOMETRY; SEMICONDUCTOR MANUFACTURING PROCESSES; TRACE GAS;

OPTICAL SENSORS;

EID: 35449006732     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.013913     Document Type: Article

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