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Volumn 84, Issue 15, 2011, Pages

Morphology evolution of thermally annealed polycrystalline thin films

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EID: 80455178898     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.84.155450     Document Type: Article
Times cited : (28)

References (40)
  • 4
    • 0032660979 scopus 로고    scopus 로고
    • JMREEE 0884-2914 10.1557/JMR.1999.0468
    • W. D. Nix and B. M. Clemens, J. Mater. Res. JMREEE 0884-2914 10.1557/JMR.1999.0468 14, 3467 (1999).
    • (1999) J. Mater. Res. , vol.14 , pp. 3467
    • Nix, W.D.1    Clemens, B.M.2
  • 5
    • 18144365883 scopus 로고    scopus 로고
    • Compressive stress in polycrystalline Volmer-Weber films
    • DOI 10.1103/PhysRevLett.94.146101, 146101
    • R. Koch, D. Hu, and A. K. Das, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.94.146101 94, 146101 (2005). (Pubitemid 40620428)
    • (2005) Physical Review Letters , vol.94 , Issue.14 , pp. 1-4
    • Koch, R.1    Hu, D.2    Das, A.K.3
  • 6
    • 77957728511 scopus 로고    scopus 로고
    • PRBMDO 1098-0121 10.1103/PhysRevB.82.121404
    • J. Leib and C. V. Thompson, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.82.121404 82, 121404 (2010).
    • (2010) Phys. Rev. B , vol.82 , pp. 121404
    • Leib, J.1    Thompson, C.V.2
  • 7
    • 0028767879 scopus 로고
    • JCOMEL 0953-8984 10.1088/0953-8984/6/45/005
    • R. Koch, J. Phys. Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/6/ 45/005 6, 9519 (1994).
    • (1994) J. Phys. Condens. Matter , vol.6 , pp. 9519
    • Koch, R.1
  • 8
    • 0037091142 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.88.156103
    • E. Chason, B. W. Sheldon, and L. B. Freund, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.88.156103 88, 156103 (2002).
    • (2002) Phys. Rev. Lett. , vol.88 , pp. 156103
    • Chason, E.1    Sheldon, B.W.2    Freund, L.B.3
  • 9
    • 0037120411 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.89.126103
    • C. Friesen and C. V. Thompson, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.89.126103 89, 126103 (2002).
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 126103
    • Friesen, C.1    Thompson, C.V.2
  • 11
    • 77951575625 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.3331986
    • S. Ruan and C. A. Schuh, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.3331986 107, 073512 (2010) and references therein.
    • (2010) J. Appl. Phys. , vol.107 , pp. 073512
    • Ruan, S.1    Schuh, C.A.2
  • 14
    • 0043031192 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.91.026101
    • M. J. Rost, D. A. Quist, and J. W. M. Frenken, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.91.026101 91, 026101 (2003).
    • (2003) Phys. Rev. Lett. , vol.91 , pp. 026101
    • Rost, M.J.1    Quist, D.A.2    Frenken, J.W.M.3
  • 15
    • 0016083153 scopus 로고
    • JVSTAL 0022-5355 10.1116/1.1312732
    • J. A. Thornton, J. Vac. Sci. Technol. JVSTAL 0022-5355 10.1116/1.1312732 11, 666 (1974).
    • (1974) J. Vac. Sci. Technol. , vol.11 , pp. 666
    • Thornton, J.A.1
  • 17
    • 70350706034 scopus 로고    scopus 로고
    • PRBMDO 1098-0121 10.1103/PhysRevB.80.125329
    • B. Sanduijav, D. Matei, G. Chen, and G. Springholz, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.80.125329 80, 125329 (2009) and references therein.
    • (2009) Phys. Rev. B , vol.80 , pp. 125329
    • Sanduijav, B.1    Matei, D.2    Chen, G.3    Springholz, G.4
  • 18
    • 33947199673 scopus 로고    scopus 로고
    • Nanogoniometry with scanning force microscopy: A model study of CdTe thin films
    • DOI 10.1002/smll.200600469
    • E. Palacios-Lidón, L. Guanter, J. Zúñiga- Pérez, V. Muñoz-Sanjosé, and J. Colchero, Small 1613-6810 10.1002/smll.200600469 3, 474 (2007). (Pubitemid 46417791)
    • (2007) Small , vol.3 , Issue.3 , pp. 474-480
    • Palacios-Lidon, E.1    Guanter, L.2    Zuniga-Perez, J.3    Munoz-Sanjose, V.4    Colchero, J.5
  • 20
    • 0029346472 scopus 로고
    • 0921-5107 10.1016/0921-5107(95)03011-5
    • C. V. Thompson and R. Carel, Mat. Sci. Eng. B 0921-5107 10.1016/0921-5107(95)03011-5 32, 211 (1995).
    • (1995) Mat. Sci. Eng. B , vol.32 , pp. 211
    • Thompson, C.V.1    Carel, R.2
  • 21
    • 0032058083 scopus 로고    scopus 로고
    • ACMAFD 1359-6454 10.1016/S1359-6454(97)00467-9
    • K. E. Harris, V. V. Singh, and A. H. King, Acta Mater. ACMAFD 1359-6454 10.1016/S1359-6454(97)00467-9 46, 2623 (1998).
    • (1998) Acta Mater. , vol.46 , pp. 2623
    • Harris, K.E.1    Singh, V.V.2    King, A.H.3
  • 23
    • 0001044673 scopus 로고
    • PRBMDO 1098-0121 10.1103/PhysRevB.43.4653
    • J. Mei, J. W. Davenport, and G. W. Fernando, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.43.4653 43, 4653 (1991).
    • (1991) Phys. Rev. B , vol.43 , pp. 4653
    • Mei, J.1    Davenport, J.W.2    Fernando, G.W.3
  • 24
    • 34548685351 scopus 로고    scopus 로고
    • Surface energy calculation of the fcc metals by using the MAEAM
    • DOI 10.1016/j.ssc.2007.07.012, PII S0038109807004930
    • Y. N. Wen and J. M. Zhang, Solid State Commun. SSCOA4 0038-1098 10.1016/j.ssc.2007.07.012 144, 163 (2007). (Pubitemid 47418864)
    • (2007) Solid State Communications , vol.144 , Issue.3-4 , pp. 163-167
    • Wen, Y.-N.1    Zhang, J.-M.2
  • 25
    • 80455138457 scopus 로고    scopus 로고
    • /m2 computed by EAM (Ref. 23) in agreement with data in Ref. 24.
    • / m 2 computed by EAM (Ref. 23) in agreement with data in Ref. 24.
  • 26
    • 34547365906 scopus 로고    scopus 로고
    • Kinetic model of stress evolution during coalescence and growth of polycrystalline thin films
    • DOI 10.1103/PhysRevLett.98.216104
    • J. S. Tello, A. F. Bower, E. Chason, and B. W. Sheldon, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.98.216104 98, 216104 (2007). (Pubitemid 47139660)
    • (2007) Physical Review Letters , vol.98 , Issue.21 , pp. 216104
    • Tello, J.S.1    Bower, A.F.2    Chason, E.3    Sheldon, B.W.4
  • 27
    • 21144476082 scopus 로고
    • PMAADG 0141-8610 10.1080/01418619308225356
    • V. Randle, Philos. Mag. A PMAADG 0141-8610 10.1080/01418619308225356 67, 1301 (1993).
    • (1993) Philos. Mag. A , vol.67 , pp. 1301
    • Randle, V.1
  • 28
    • 0000834461 scopus 로고    scopus 로고
    • MSFOEP 0255-5476 10.4028/www.scientific.net/MSF.204-206.461
    • T. Yamasaki, Y. Demizu, and Y. Ogino, Mater. Sci. Forum MSFOEP 0255-5476 10.4028/www.scientific.net/MSF.204-206.461 204, 461 (1996).
    • (1996) Mater. Sci. Forum , vol.204 , pp. 461
    • Yamasaki, T.1    Demizu, Y.2    Ogino, Y.3
  • 29
    • 78649630586 scopus 로고    scopus 로고
    • SCMAF7 1359-6462 10.1016/j.scriptamat.2010.10.029
    • P. Liu, S. C. Mao, L. H. Wang, X. D. Han, and Z. Zhang, Scr. Mater. SCMAF7 1359-6462 10.1016/j.scriptamat.2010.10.029 64, 343 (2011).
    • (2011) Scr. Mater. , vol.64 , pp. 343
    • Liu, P.1    Mao, S.C.2    Wang, L.H.3    Han, X.D.4    Zhang, Z.5
  • 30
    • 0035834206 scopus 로고    scopus 로고
    • Theory of diffusion-accommodated grain rotation in columnar polycrystalline microstructures
    • DOI 10.1016/S1359-6454(01)00240-3, PII S1359645401002403
    • D. Moldovan, D. Wolf, and S. R. Phillpot, Acta Mater. ACMAFD 1359-6454 10.1016/S1359-6454(01)00240-3 49, 3521 (2001); (Pubitemid 32850844)
    • (2001) Acta Materialia , vol.49 , Issue.17 , pp. 3521-3532
    • Moldovan, D.1    Wolf, D.2    Phillpot, S.R.3
  • 31
    • 0036682213 scopus 로고    scopus 로고
    • Role of grain rotation during grain growth in a columnar microstructure by mesoscale simulation
    • DOI 10.1016/S1359-6454(02)00153-2, PII S1359645402001532
    • D. Moldovan, D. Wolf, S. R. Phillpot, and A. J. Haslam, Acta Mater. ACMAFD 1359-6454 10.1016/S1359-6454(02)00153-2 50, 3397 (2002). (Pubitemid 34822251)
    • (2002) Acta Materialia , vol.50 , Issue.13 , pp. 3397-3414
    • Moldovan, D.1    Wolf, D.2    Phillpot, S.R.3    Haslam, A.J.4
  • 33
    • 0026203583 scopus 로고
    • EAM study of surface self-diffusion of single adatoms of fcc metals Ni, Cu, Al, Ag, Au, Pd, and Pt
    • DOI 10.1016/0039-6028(91)90604-Q
    • C. L. Liu, Surf. Sci. SUSCAS 0039-6028 10.1016/0039-6028(91)90604-Q 253, 334 (1991). (Pubitemid 21721714)
    • (1991) Surface Science , vol.253 , Issue.1-3 , pp. 334-344
    • Liu, C.L.1    Cohen, J.M.2    Adams, J.B.3    Voter, A.F.4
  • 34
    • 0015672818 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1661981
    • D. Gupta, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1661981 44, 4455 (1973);
    • (1973) J. Appl. Phys. , vol.44 , pp. 4455
    • Gupta, D.1
  • 35
    • 0345613142 scopus 로고
    • PRBMDO 1098-0121 10.1103/PhysRevB.7.586
    • D. Gupta, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.7.586 7, 586 (1973).
    • (1973) Phys. Rev. B , vol.7 , pp. 586
    • Gupta, D.1
  • 36
    • 80455177598 scopus 로고    scopus 로고
    • A grain rotation rate of 2.4°/h involving GB self-diffusions was estimated for 66 nm-sized grains within the bulk of a polycrystalline Au(111) film (Ref. 21); whereas for high-mobility GBs with enhanced dislocation/ disclination activity, a higher rotation rate of 10°/h was reported in Ref. 29
    • A grain rotation rate of 2.4°/h involving GB self-diffusions was estimated for 66 nm-sized grains within the bulk of a polycrystalline Au(111) film (Ref. 21); whereas for high-mobility GBs with enhanced dislocation/ disclination activity, a higher rotation rate of 10°/h was reported in Ref. 29.
  • 37
    • 33745231360 scopus 로고    scopus 로고
    • Nanoindentation measurements of the mechanical properties of polycrystalline Au and Ag thin films on silicon substrates: Effects of grain size and film thickness
    • DOI 10.1016/j.msea.2006.04.080, PII S0921509306004473
    • Y. Cao, S. Allameh, D. Nankivil, S. Sethiaraj, T. Otiti, and W. Soboyejo, Mater. Sci. Eng. A MSAPE3 0921-5093 10.1016/j.msea.2006.04.080 427, 232 (2006). (Pubitemid 43923586)
    • (2006) Materials Science and Engineering A , vol.427 , Issue.1-2 , pp. 232-240
    • Cao, Y.1    Allameh, S.2    Nankivil, D.3    Sethiaraj, S.4    Otiti, T.5    Soboyejo, W.6
  • 38
    • 0001091690 scopus 로고    scopus 로고
    • PRBMDO 1098-0121 10.1103/PhysRevB.57.12588
    • J. D. Kiely and J. E. Houston, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.57.12588 57, 12588 (1998).
    • (1998) Phys. Rev. B , vol.57 , pp. 12588
    • Kiely, J.D.1    Houston, J.E.2
  • 39
    • 0023040644 scopus 로고
    • Surface-energy-driven secondary grain growth in thin Au films
    • DOI 10.1063/1.96543
    • C. C. Wong, H. I. Smith, and C. V. Thompson, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.96543 48, 335 (1986). (Pubitemid 17615531)
    • (1986) Applied Physics Letters , vol.48 , Issue.5 , pp. 335-337
    • Wong, C.C.1    Smith, H.I.2    Thompson, C.V.3
  • 40
    • 33646784669 scopus 로고    scopus 로고
    • Grain growth controlled by mobile particles on grain boundaries
    • DOI 10.1016/j.scriptamat.2006.04.006, PII S1359646206003137
    • V. Y. Novikov, Scr. Mater. SCMAF7 1359-6462 10.1016/j.scriptamat.2006.04. 006 55, 243 (2006). (Pubitemid 43765892)
    • (2006) Scripta Materialia , vol.55 , Issue.3 , pp. 243-246
    • Novikov, V.Yu.1


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