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Volumn 171, Issue 2, 2011, Pages 340-351

A two dimensional vision-based force sensor for microrobotic applications

Author keywords

Micro Newton force sensing; Microrobotics; PDMS compliant mechanism; Vision based sensor

Indexed keywords

COMPLIANT MECHANISM; ELASTIC MECHANISM; EXPERIMENTAL VALIDATIONS; FORCE SENSING; FORCE SENSOR; MICRO ROBOTICS; MICRO-ASSEMBLY APPLICATIONS; MICRO-SCALE OBJECT; OPTICAL MICROSCOPES; VISION BASED; VISION-BASED SENSORS;

EID: 80055064157     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.06.014     Document Type: Article
Times cited : (49)

References (47)
  • 5
    • 33645975466 scopus 로고    scopus 로고
    • Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator
    • R. Perez, and N. Chaillet Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator Sensors and Actuators A: Physical 128 2006 367 375
    • (2006) Sensors and Actuators A: Physical , vol.128 , pp. 367-375
    • Perez, R.1    Chaillet, N.2
  • 6
    • 0034499618 scopus 로고    scopus 로고
    • Three-dimensional microfabrication for a multi-degree-of-freedom capacitive force sensor using fibre-chip coupling
    • E. Enikov, and B. Nelson Three-dimensional microfabrication for a multi-degree-of-freedom capacitive force sensor using fibre-chip coupling Journal of Micromechanics and Microengineering 10 2000 492 497
    • (2000) Journal of Micromechanics and Microengineering , vol.10 , pp. 492-497
    • Enikov, E.1    Nelson, B.2
  • 7
    • 0036853462 scopus 로고    scopus 로고
    • A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives
    • Y. Sun, B. Nelson, D. Potasek, E. Enikov, A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives, Journal of Micromechanics and Microengineering 12 (2002) 832-840.
    • (2002) Journal of Micromechanics and Microengineering , vol.12 , pp. 832-840
    • Sun, Y.1    Nelson, B.2    Potasek, D.3    Enikov, E.4
  • 9
    • 33947219854 scopus 로고    scopus 로고
    • Monolithically fabricated micro-gripper with integrated force sensor for manipulating micro-objects and biological cells aligned in an ultrasonic field
    • F. Beyeler, A. Neild, S. Oberti, D. Bell, Y. Sun, J. Dual, and B. Nelson Monolithically fabricated micro-gripper with integrated force sensor for manipulating micro-objects and biological cells aligned in an ultrasonic field IEEE/ASME Journal of Microelectromechanical Systems (JMEMS) 16 1 2007 7 15
    • (2007) IEEE/ASME Journal of Microelectromechanical Systems (JMEMS) , vol.16 , Issue.1 , pp. 7-15
    • Beyeler, F.1    Neild, A.2    Oberti, S.3    Bell, D.4    Sun, Y.5    Dual, J.6    Nelson, B.7
  • 11
    • 67349247068 scopus 로고    scopus 로고
    • A novel technique of microforce sensing and loading
    • X. Li, D. Su, and Z. Zhang A novel technique of microforce sensing and loading Sensors and Actuators A: Physical 153 2009 13 23
    • (2009) Sensors and Actuators A: Physical , vol.153 , pp. 13-23
    • Li, X.1    Su, D.2    Zhang, Z.3
  • 14
    • 80055034016 scopus 로고    scopus 로고
    • SensorOne, AE801
    • SensorOne, AE801, http://sensorone.com/ae801-home.asp.
  • 19
    • 27744587245 scopus 로고    scopus 로고
    • Force measurements with the atomic force microscope: Technique, interpretation and applications
    • H.-J. Butt, B. Cappella, and M. Kappl Force measurements with the atomic force microscope: technique, interpretation and applications Surface Science Reports 59 2005 1 152
    • (2005) Surface Science Reports , vol.59 , pp. 1-152
    • Butt, H.-J.1    Cappella, B.2    Kappl, M.3
  • 20
    • 1842457614 scopus 로고    scopus 로고
    • Teleoperated and automatic nanomanipulation systems using atomic force microscope probes
    • Maui, HI, USA
    • M. Sitti Teleoperated and automatic nanomanipulation systems using atomic force microscope probes 42nd IEEE Conference on Decision and Control Maui, HI, USA 2003
    • (2003) 42nd IEEE Conference on Decision and Control
    • Sitti, M.1
  • 21
    • 33750476626 scopus 로고    scopus 로고
    • Micromachined piconewton force sensor for biophysics investigations
    • S. Koch, G. Thayer, A. Corwin, M. de Boer, Micromachined piconewton force sensor for biophysics investigations, Applied Physics Letters 89, 173901.
    • Applied Physics Letters , vol.89 , pp. 173901
    • Koch, S.1    Thayer, G.2    Corwin, A.3    De Boer, M.4
  • 22
    • 33847351187 scopus 로고    scopus 로고
    • Fabrication of a millinewton force sensor using low temperature co-fired ceramic(ltcc) technology
    • H. Birol, and T. Maeder Fabrication of a millinewton force sensor using low temperature co-fired ceramic(ltcc) technology Sensors and Actuators A: Physical 134 2007 334 338
    • (2007) Sensors and Actuators A: Physical , vol.134 , pp. 334-338
    • Birol, H.1    Maeder, T.2
  • 23
    • 4544317506 scopus 로고    scopus 로고
    • A micro optical force sensor for force feedback during minimally invasive robotic surgery
    • J. Peirs, and J. Clijnen A micro optical force sensor for force feedback during minimally invasive robotic surgery Sensors and Actuators A: Physical 115 2004 447 455
    • (2004) Sensors and Actuators A: Physical , vol.115 , pp. 447-455
    • Peirs, J.1    Clijnen, J.2
  • 24
    • 27644513652 scopus 로고    scopus 로고
    • Microoptical characterization and modeling of positioning forces on drosophila embryos self-assembled in two-dimensional arrays
    • X. Zhang, C.-C. Chen, R. Bernstein, S. Zappe, M. Scott, and O. Solgaard Microoptical characterization and modeling of positioning forces on drosophila embryos self-assembled in two-dimensional arrays Journal of Microelectromechanical Systems 14 5 2005 1187 1197
    • (2005) Journal of Microelectromechanical Systems , vol.14 , Issue.5 , pp. 1187-1197
    • Zhang, X.1    Chen, C.-C.2    Bernstein, R.3    Zappe, S.4    Scott, M.5    Solgaard, O.6
  • 27
    • 20844434656 scopus 로고    scopus 로고
    • Direct force measurements of biomolecular interactions by nanomechanical force gauge
    • K.-H. Jeong, C. Keller, L. Lee, Direct force measurements of biomolecular interactions by nanomechanical force gauge, Applied Physics Letters 86, 19.
    • Applied Physics Letters , vol.86 , pp. 19
    • Jeong, K.-H.1    Keller, C.2    Lee, L.3
  • 30
    • 34249100610 scopus 로고    scopus 로고
    • Design and microfabrication of a high-aspect-ratio pdms microbeam array for parallel nanonewton force measurement and protein printing
    • F. Sasoglu, A. Bohl, and B. Layton Design and microfabrication of a high-aspect-ratio pdms microbeam array for parallel nanonewton force measurement and protein printing Journal of Micromechanics and Microengineering 17 2007 623 632
    • (2007) Journal of Micromechanics and Microengineering , vol.17 , pp. 623-632
    • Sasoglu, F.1    Bohl, A.2    Layton, B.3
  • 36
    • 29144534678 scopus 로고    scopus 로고
    • Nanoindentation of polydimethylsiloxane elastomers: Effect of crosslinking, work of adhesion, and fluid environment on elastic modulus
    • F. Carrillo, S. Gupta, M. Balooch, S. Marshall, G. Marshall, L. Pruitt, C. Puttlitz, Nanoindentation of polydimethylsiloxane elastomers: effect of crosslinking, work of adhesion, and fluid environment on elastic modulus, Journal of Materials Research 20 (10) (2005) 2820-2830.
    • (2005) Journal of Materials Research , vol.20 , Issue.10 , pp. 2820-2830
    • Carrillo, F.1    Gupta, S.2    Balooch, M.3    Marshall, S.4    Marshall, G.5    Pruitt, L.6    Puttlitz, C.7
  • 37
    • 0003532560 scopus 로고    scopus 로고
    • Kluwer Academic Publishers Boston, MA
    • S. Senturia Microsystem Design 2003 Kluwer Academic Publishers Boston, MA
    • (2003) Microsystem Design
    • Senturia, S.1
  • 40
    • 0032630811 scopus 로고    scopus 로고
    • Making honeycomb microcomposites by soft lithography
    • B. Xu, F. Arias, and G. Whitesides Making honeycomb microcomposites by soft lithography Advanced Matter 11 6 1999 492 495
    • (1999) Advanced Matter , vol.11 , Issue.6 , pp. 492-495
    • Xu, B.1    Arias, F.2    Whitesides, G.3
  • 42
    • 0001155528 scopus 로고    scopus 로고
    • Calibration of rectangular atomic force microscope cantilevers
    • J. Sader, J. Chon, and P. Mulvaney Calibration of rectangular atomic force microscope cantilevers Review of Scientific Instruments 70 1999 3967 3969
    • (1999) Review of Scientific Instruments , vol.70 , pp. 3967-3969
    • Sader, J.1    Chon, J.2    Mulvaney, P.3
  • 43
    • 23844554517 scopus 로고    scopus 로고
    • Viscoelastic characterization of polymers using dynamic instrumented indentation
    • R5.3.1-R5.3.6
    • C. White, and R. Drzal Viscoelastic characterization of polymers using dynamic instrumented indentation Mater. Res. Soc. Symp. Proc. 841 2005 R5.3.1-R5.3.6
    • (2005) Mater. Res. Soc. Symp. Proc. , vol.841
    • White, C.1    Drzal, R.2
  • 45
    • 80055054160 scopus 로고    scopus 로고
    • MatWeb, www.matweb.com.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.