Actively servoed multi-axis microforce sensors

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 1, Issue , 2003, Pages 294-299

  Sun, Yu ^a   Potasek, D P ^a   Piyabongkarn, D ^a   Rajamani, R ^a   Nelson, B J ^b  

^a University of Minnesota   (United States)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; END EFFECTORS; FORCE MEASUREMENT; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PROBES; ROBOTICS;

MICROMANIPULATION; MICROROBOTIC CELL MANIPULATION; MULTI-AXIS MICROFORCE SENSORS;

MICROSENSORS;

EID: 0345307753     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

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