Piezoresistive response of vertical hall devices

IEEE Sensors Journal

Volumn 11, Issue 11, 2011, Pages 2628-2635

  Kaufmann, Timo ^a   Kopp, Daniel ^a   Purkl, Fabian ^a   Baumann, Marc ^a   Ruther, Patrick ^a   Paul, Oliver ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

CMOS Hall sensor; device characterization; five contact device; offset voltage; piezoresistive; vertical Hall sensor (VHS)

Indexed keywords

DEVICE CHARACTERIZATION; FIVE-CONTACT DEVICE; HALL SENSOR; OFFSET VOLTAGE; PIEZO-RESISTIVE; VERTICAL HALL SENSORS;

HALL EFFECT TRANSDUCERS; STRESS CONCENTRATION;

SENSORS;

EID: 80054864891     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2153194     Document Type: Article

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