Reliability of AlN/sapphire bilayer structure for high-temperature SAWapplications

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 1490-1493

  Aubert, Thierry ^a   Elmazria, Omar ^a   Assouar, Badreddine ^a   Hamdan, Ahmad ^a   Geneve, Damien ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

AlN; high temperature; sapphire; SAW

Indexed keywords

AIR ATMOSPHERE; ALN; BI-LAYER; BI-LAYER STRUCTURE; HIGH TEMPERATURE; IN-SITU MEASUREMENT; SAPPHIRE SUBSTRATES; SAW DEVICE; SECONDARY ION MASS SPECTROSCOPY; SURFACE ACOUSTIC WAVE DEVICE; XRD; EXPERIMENTAL STUDIES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ALUMINUM COMPOUNDS; NITRIDES; SAPPHIRE; SECONDARY ION MASS SPECTROMETRY; SUBSTRATES; ULTRASONICS; FREQUENCY RESPONSE; HIGH TEMPERATURE APPLICATIONS; SURFACE STRUCTURE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

ATMOSPHERIC TEMPERATURE;

EID: 80054081700     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5935568     Document Type: Conference Paper

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