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Volumn 20, Issue 5, 2011, Pages 1089-1097

Microbricks for three-dimensional reconfigurable modular microsystems

Author keywords

Integrated systems; microbrick; modular architecture; rapid assembler

Indexed keywords

3D STRUCTURES; BUILDING BLOCKES; DESIGN CONSIDERATIONS; FABRICATION TECHNIQUE; INTEGRATED SYSTEMS; MACRO SCALE; MICRO-SCALE COMPONENTS; MICRO-SCALES; MICROBRICK; MICROMACHINED; MODULAR ARCHITECTURE; PROOF OF CONCEPT; RAPID ASSEMBLER; RE-CONFIGURABLE; REGULAR LATTICE; SPACE-FILLING; SU-8 POLYMER; THREE-LAYER; TWO-MATERIALS;

EID: 80053564524     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2162491     Document Type: Article
Times cited : (7)

References (22)
  • 1
    • 76749151046 scopus 로고    scopus 로고
    • Agile multi-parallel micro manufacturing using a grid of equiplets
    • S. Ratchev, Ed. Boston, MA: Springer-Verlag ser. IFIP Advances in Information and Communication Technology
    • E. Puik and L. van Moergestel, "Agile multi-parallel micro manufacturing using a grid of equiplets," in Precision Assembly Technologies and Systems, vol. 315, S. Ratchev, Ed. Boston, MA: Springer-Verlag, 2010, ser. IFIP Advances in Information and Communication Technology, pp. 271-282.
    • (2010) Precision Assembly Technologies and Systems , vol.315 , pp. 271-282
    • Puik, E.1    Van Moergestel, L.2
  • 2
    • 80053569340 scopus 로고    scopus 로고
    • Infrastructure driven strategies for microsystems business success in a market driven era
    • San Diego, CA Sep.
    • A. Gutierrez, "Infrastructure driven strategies for microsystems business success in a market driven era," in Proc. Commercial. Microsyst. Conf., San Diego, CA, Sep. 1998.
    • (1998) Proc. Commercial. Microsyst. Conf.
    • Gutierrez, A.1
  • 3
    • 0042244802 scopus 로고    scopus 로고
    • MEMS/MST fabrication technology based on microbricks: A strategy for industry growth
    • A. Gutierrez, "MEMS/MST fabrication technology based on microbricks: A strategy for industry growth," MST News, vol. 1, no. 99, pp. 4-8, 1999.
    • (1999) MST News , vol.1 , Issue.99 , pp. 4-8
    • Gutierrez, A.1
  • 4
    • 0037682257 scopus 로고    scopus 로고
    • Parallel assembly of microsystems using Si micro electro mechanical systems
    • Jun.
    • G. Skidmore, M. Ellis, A. Geisberger, K. Tsui, R. Saini, T. Huang, and J. Randall, "Parallel assembly of microsystems using Si micro electro mechanical systems," Microelectron. Eng., vol. 67/68, no. 1, pp. 445-452, Jun. 2003.
    • (2003) Microelectron. Eng. , vol.67-68 , Issue.1 , pp. 445-452
    • Skidmore, G.1    Ellis, M.2    Geisberger, A.3    Tsui, K.4    Saini, R.5    Huang, T.6    Randall, J.7
  • 6
    • 21644436666 scopus 로고    scopus 로고
    • Microrobotics and MEMS-based fabrication techniques for scaffold-based tissue engineering
    • DOI 10.1002/mabi.200400202
    • H. Zhang, D. W. Hutmacher, F. Chollet, A. N. Poo, and E. Burdet, "Microrobotics and MEMS-based fabrication techniques for scaffold-based tissue engineering," Macromolecular Biosci., vol. 5, no. 6, pp. 477-489, Jun. 2005. (Pubitemid 40933985)
    • (2005) Macromolecular Bioscience , vol.5 , Issue.6 , pp. 477-489
    • Zhang, H.1    Hutmacher, D.W.2    Chollet, F.3    Poo, A.N.4    Burdet, E.5
  • 8
    • 67649497967 scopus 로고    scopus 로고
    • Design and analysis of digital materials for physical 3D voxel printing
    • J. Hiller and H. Lipson, "Design and analysis of digital materials for physical 3D voxel printing," Rapid Prototyping J., vol. 15, no. 2, pp. 137-149, 2009.
    • (2009) Rapid Prototyping J. , vol.15 , Issue.2 , pp. 137-149
    • Hiller, J.1    Lipson, H.2
  • 9
    • 46849121617 scopus 로고    scopus 로고
    • Microassembly fabrication of tissue engineering scaffolds with customized design
    • Jul.
    • H. Zhang, E. Burdet, A. Poo, and D. Hutmacher, "Microassembly fabrication of tissue engineering scaffolds with customized design," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 3, pp. 446-456, Jul. 2008.
    • (2008) IEEE Trans. Autom. Sci. Eng. , vol.5 , Issue.3 , pp. 446-456
    • Zhang, H.1    Burdet, E.2    Poo, A.3    Hutmacher, D.4
  • 10
  • 12
    • 0033732466 scopus 로고    scopus 로고
    • Hot embossing as a method for the fabrication of polymer high aspect ratio structures
    • May
    • H. Becker and U. Heim, "Hot embossing as a method for the fabrication of polymer high aspect ratio structures," Sens. Actuators A, Phys., vol. 83, no. 1-3, pp. 130-135, May 2000.
    • (2000) Sens. Actuators A, Phys. , vol.83 , Issue.1-3 , pp. 130-135
    • Becker, H.1    Heim, U.2
  • 13
    • 0031685664 scopus 로고    scopus 로고
    • Hot embossing in polymers as a direct way to pattern resist
    • PII S016793179800135X
    • R. W. Jaszewski, H. Schift, J. Gobrecht, and P. Smith, "Hot embossing in polymers as a direct way to pattern resist," Microelectron. Eng., vol. 41-42, pp. 575-578, Mar. 1998. (Pubitemid 128651152)
    • (1998) Microelectronic Engineering , vol.41-42 , pp. 575-578
    • Jaszewski, R.W.1    Schift, H.2    Gobrecht, J.3    Smith, P.4
  • 15
    • 0035280354 scopus 로고    scopus 로고
    • Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
    • DOI 10.1016/S0924-4247(00)00545-8
    • L.-A. Liew, W. Zhang, V. M. Bright, L. An, M. L. Dunn, and R. Raj, "Fabrication of SiCN ceramic MEMS using injectable polymerprecursor technique," Sens. Actuators A, Phys., vol. 89, no. 1/2, pp. 64-70, Mar. 2001. (Pubitemid 32254941)
    • (2001) Sensors and Actuators, A: Physical , vol.89 , Issue.1-2 , pp. 64-70
    • Liew, L.-A.1    Zhang, W.2    Bright, V.M.3    An, L.4    Dunn, M.L.5    Raj, R.6
  • 16
    • 33748806603 scopus 로고    scopus 로고
    • A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts
    • Oct.
    • I. G. Foulds and M. Parameswaran, "A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts," J. Micromech. Microeng., vol. 16, no. 10, p. 2109, Oct. 2006.
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.10 , pp. 2109
    • Foulds, I.G.1    Parameswaran, M.2
  • 17
    • 31344471503 scopus 로고    scopus 로고
    • Fabrication of multi-layer SU-8 microstructures
    • Feb.
    • A. Mata, A. J. Fleischman, and S. Roy, "Fabrication of multi-layer SU-8 microstructures," J. Micromech. Microeng., vol. 16, no. 2, p. 276, Feb. 2006.
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.2 , pp. 276
    • Mata, A.1    Fleischman, A.J.2    Roy, S.3
  • 18
    • 77953599561 scopus 로고    scopus 로고
    • Tunable digital material properties for 3D voxel printers
    • J. Hiller and H. Lipson, "Tunable digital material properties for 3D voxel printers," Rapid Prototyping J., vol. 16, no. 4, pp. 241-247, 2010.
    • (2010) Rapid Prototyping J. , vol.16 , Issue.4 , pp. 241-247
    • Hiller, J.1    Lipson, H.2
  • 20
    • 0031674888 scopus 로고    scopus 로고
    • High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
    • PII S0924424797016518
    • H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger, and P. Renaud, "High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS," Sens. Actuators A, Phys., vol. 64, no. 1, pp. 33-39, Jan. 1998. (Pubitemid 128388317)
    • (1998) Sensors and Actuators, A: Physical , vol.64 , Issue.1 , pp. 33-39
    • Lorenz, H.1    Despont, M.2    Fahrni, N.3    Brugger, J.4    Vettiger, P.5    Renaud, P.6
  • 22
    • 0033537535 scopus 로고    scopus 로고
    • 3D microfabrication by combining microstereolithography and thick resist UV lithography
    • Mar.
    • A. Bertsch, H. Lorenz, and P. Renaud, "3D microfabrication by combining microstereolithography and thick resist UV lithography," Sens. Actuators A, Phys., vol. 73, no. 1/2, pp. 14-23, Mar. 1999.
    • (1999) Sens. Actuators A, Phys. , vol.73 , Issue.1-2 , pp. 14-23
    • Bertsch, A.1    Lorenz, H.2    Renaud, P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.