Continuous patterning of nanogratings by nanochannel-guided lithography on liquid resists

Advanced Materials

Volumn 23, Issue 38, 2011, Pages 4444-4448

  Ok, Jong G ^a   Park, Hui Joon ^a   Kwak, Moon Kyu ^a   Pina Hernandez, Carlos A ^a   Ahn, Se Hyun ^a,b   Guo, L Jay ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b MOLECULAR IMPRINTS INC   (United States)

Author keywords

capillary lithography; nanoimprinting; nanopatterning; surface modification; UV curable polymeric materials

Indexed keywords

CAPILLARY LITHOGRAPHY; CROSS-LINKABLE; NANO CHANNELS; NANO-GRATING STRUCTURES; NANO-GRATINGS; NANO-IMPRINTING; NANOPATTERNING; RESIST COATINGS; SOLID SUBSTRATES; SUBSTRATE TOPOGRAPHY; UV CURABLE;

ASPECT RATIO; CURING; LITHOGRAPHY; SURFACE TREATMENT;

LIQUIDS;

NANOMATERIAL; POLYETHYLENE TEREPHTHALATE; SILICON; SILICON DIOXIDE;

ARTICLE; CHEMISTRY; HEAT; METHODOLOGY; NANOTECHNOLOGY; PRINTING; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY; TEMPERATURE; ULTRASTRUCTURE; VISCOSITY;

HOT TEMPERATURE; MICROSCOPY, ELECTRON, SCANNING; NANOSTRUCTURES; NANOTECHNOLOGY; POLYETHYLENE TEREPHTHALATES; PRINTING; SILICON; SILICON DIOXIDE; SURFACE PROPERTIES; TEMPERATURE; VISCOSITY;

EID: 80053476530     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201102199     Document Type: Article

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