Controlled oxygen vacancy induced p-type conductivity in HfO 2-x thin films

Applied Physics Letters

Volumn 99, Issue 11, 2011, Pages

  Hildebrandt, Erwin ^a   Kurian, Jose ^a   Mller, Mathis M ^a   Schroeder, Thomas ^b   Kleebe, Hans Joachim ^a   Alff, Lambert ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BAND GAPS; DEFECT BANDS; OXYGEN DEFICIENT; P-TYPE; P-TYPE CONDUCTIVITY;

MOLECULAR BEAM EPITAXY; MOLECULAR OXYGEN; THIN FILMS;

OXYGEN VACANCIES;

EID: 80053187995     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3637603     Document Type: Article

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