Fabrication and characterization of high-k dielectric nickel titanate thin films using a modified sol-gel method

Journal of the American Ceramic Society

Volumn 94, Issue 1, 2011, Pages 250-254

  Chuang, Shiow Huey ^a   Hsieh, Min Lung ^a   Wu, Shih Chieh ^b   Lin, Hong Cai ^a   Chao, Tien Sheng ^b   Hou, Tuo Hung ^b  

^a NATIONAL UNIVERSITY OF KAOHSIUNG   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

2-METHOXYETHANOL; CAPACITANCE VOLTAGE; HIGH QUALITY; HIGH-K DIELECTRIC; HIGH-K MATERIALS; MODIFIED SOL-GEL METHOD; NICKEL ACETATE TETRAHYDRATE; NICKEL TITANATES; SCANNING ELECTRON MICROSCOPE; SMOOTH SURFACE; SOL-GEL SPIN COATING METHOD; TITANIUM ISOPROPOXIDE; X RAY PHOTOELECTRON SPECTRA;

BINDING ENERGY; COATINGS; DIELECTRIC MATERIALS; GATE DIELECTRICS; GELS; NICKEL; ORGANOMETALLICS; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; TITANIUM; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM PREPARATION;

EID: 80053112576     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2010.04037.x     Document Type: Article

References (34)

1. 3-Based PTC-CO Gas Sensor," Sens. Actuat. B, 93, 391-5 (2003).
2. 3 Synthesized via Polyol Method," Sens. Actuat. B, 126, 595-603 (2007). (Pubitemid 47405188)
3. Q. Zhu, W. Y. Shih, and, W. H. Shih, " Real-Time, Label-Free, All-Electrical Detection of Salmonella Typhimurium Using Lead Titanate Zirconate/Gold-coated Glass Cantilevers at Any Relative Humidity," Sens. Actuat. B, 125, 379-88 (2007). (Pubitemid 47095215)
4. S. H. Xiao, H. J. Xu, J. Hu, W. F. Jiang, and, X. J. Li, " Structure and Humidity Sensing Properties of Barium Strontium Titanate/Silicon Nanoporous Pillar Array Composite Films," Thin Solid Films, 517, 929-32 (2008).
5. R. A. Potyrailo, and, V. M. Mirsky, " Combinatorial and High-Throughput Development of Sensing Materials: The First 10 Years," Chem. Rev., 108 [2] 770-813 (2008). (Pubitemid 351350391)
6. G. Radnóczi, P. B. Barna, M. Adamik, Z. Czigány, J. Ariake, N. Honda, and, K. Ouchi, " Growth Structure of Thin Films for Perpendicular Magnetic Recording Media," Cryst. Res. Technol., 35 [6-7] 707-11 (2000).
7. K. Tohji, Y. Udagawa, S. Tanabe, T. Ida, and, A. Ueno, " Catalyst Preparation Procedure Probed by EXAFS Spectroscopy. 2. Cobalt on Titania," J. Am. Chem. Soc., 106 [18] 5172-8 (1984). (Pubitemid 14622016)
8. L. Chen, S. Zhang, L. Wang, D. Xue, and, S. Yin, " Preparation and Photocatalytic Properties of Strontium Titanate Powders via Sol-Gel Process," J. Cryst. Growth, 311, 746-8 (2009).
9. Y. Ni, X. Wang, and, J. Hong, " Nickel Titanate Microtubes Constructed by Nearly Spherical Nanoparticles: Preparation, Characterization and Properties," Mater. Res. Bull., 44, 1797-801 (2009).
10. 3 by Modified Sol-Gel Route," J. Alloys Compd., 456, 353-7 (2008). (Pubitemid 351470096)
11. B. Cheng, M. Cao, P. V. Voorde, W. Greene, H. Stork, Z. Yu, and, J. C. S. Woo, " Design Considerations of High-k Gate Dielectrics for Sub-0.1-μm MOSFET's," IEEE Trans. Electron Devices, 46 [1] 261-2 (1999).
12. T. M. Pan, T. F. Lei, and, T. S. Chao, " High-k Cobalt-Titanium Oxide Dielectrics Formed by Oxidation of Sputtered Co/Ti or Ti/Co Films," Appl. Phys. Lett., 78 [10] 1439-41 (2001). (Pubitemid 33611187)
13. 3 High-k Dielectrics with Nitrogen Incorporation," J. Electrochem. Soc., 154 [1] G18-23 (2007). (Pubitemid 44866340)
14. 3 Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method," Chem. Mater., 14 [12] 5006-14 (2002).
15. Y. Gan, Q. J. Cai, C. M. Li, H. B. Yang, Z. S. Lu, C. Gong, and, M. B. Chan-Park, " Solution-Prepared Hybrid-Nanoparticle Dielectrics for High-Performance Low-Voltage Organic Thin-Film Transistors," ACS Appl. Mater. Interfaces, 1 [10] 2230-6 (2009).
16. X. Du, Y. Xu, H. Ma, J. Wang, and, X. Li, " Low-Temperature Synthesis of Bismuth Titanate by an Aqueous Sol-Gel Method," J. Am. Ceram. Soc., 91 [7] 2079-82 (2008).
17. P. R. Evans, X. H. Zhu, P. Baxter, M. McMillen, J. McPhillips, F. D. Morrison, J. F. Scott, R. J. Pollard, R. M. Bowman, and, J. M. Gregg, " Toward Self-Assembled Ferroelectric Random Access Memories: Hard-Wired Switching Capacitor Arrays with Almost Tb/in.2 Densities," Nano Lett., 7 [5] 1134-7 (2007). (Pubitemid 46834386)
18. 3 Thin Films at Low Temperature for Low-Voltage Operation," Jpn. J. Appl. Phys., 42 [5A] 2756-8 (2003).
19. E. M. Alkoy, C. Dagdeviren, and, M. Papila, " Processing Conditions and Aging Effect on the Morphology of PZT Electrospun Nanofibers, and Dielectric Properties of the Resulting 3-3 PZT/Polymer Composite," J. Am. Ceram. Soc., 92 [11] 2566-70 (2009).
20. 3 Prepared by a Modified Pechini Method," J. Non-Cryst. Solids, 352, 789-94 (2006).
21. A. E. Henkes, J. C. Bauer, A. K. Sra, R. D. Johnson, R. E. Cable, and, R. E. Schaak, " Low-Temperature Nanoparticle-Directed Solid-State Synthesis of Ternary and Quaternary Transition Metal Oxides," Chem. Mater., 18 [2] 567-71 (2006). (Pubitemid 43293331)
22. 3 Nanopowders Prepared by Stearic Acid Gel Method," Mater. Lett., 62, 3679-81 (2008).
23. 3 Powders Obtained by Polymeric Precursor Method: Synthesis and Characterization," J. Alloys Compd., 468, 327-32 (2009).
24. 3 High-k Gate Dielectrics," J. Appl. Phys., 89 [6] 3447-52 (2001). (Pubitemid 33596818)
25. A. R. Phani, and, S. Santucci, " Structural Characterization of Nickel Titanium Oxide Synthesized by Sol-Gel Spin Coating Technique," Thin Solid Films, 396, 1-4 (2001). (Pubitemid 32975609)
26. Y. Ohya, T. Niwa, T. Ban, and, Y. Takahashi, " Rectifying Properties of Oxide Semiconductor Heterostack Films at Elevated Temperatures," J. Sol-Gel Sci. Technol., 33, 323-6 (2005). (Pubitemid 40356857)
27. B. L. Cushing, V. L. Kolesnichenko, and, C. J. O'Connor, " Recent Advances in the Liquid-Phase Syntheses of Inorganic Nanoparticles," Chem. Rev., 104 [9] 3893-946 (2004).
28. B. D. Cullity, and, S. R. Stock, Elements of X-Ray Diffraction. Prentice-Hall Inc., New Jersey, 2001 170pp.
29. J. F. Moulder, W. F. Stickle, P. E. Sobol, and, K. D. Bomben, Handbook of X-Ray Photoelectron Spectroscopy, pp. 18-20. Perkin-Elmer Corp., Minnesota, 1992.
30. H.-T. Chiu, C.-N. Wang, and, S.-H. Chuang, " Metal-Organic CVD of Tantalum Oxide from Tert-Butylimidotris(diethylamido)tantalum and Oxygen," Chem. Vap. Deposition., 6 [5] 223-5 (2000).
31. 2 Reforming of Methane," J. Nat. Gas Chem., 17 [2] 179-83 (2008).
32. 3 Nanoparticles," Bull. Korean Chem. Soc., 27 [3] 368-72 (2006).
33. 3," J. Solid State Chem., 112, 9-14 (1994).
34. 3 Ceramics by a Modified Sol-Gel Route," J. Alloys Compd., 420, 317-21 (2006). (Pubitemid 43994422)