Low-pressure crystallization of sol-gel-derived PbZr0.52Ti0.48O3 thin films at low temperature for low-voltage operation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 5 A, 2003, Pages 2756-2758

  Wang, Ding Yeong ^a   Chien, Chao Hsin ^b   Chang, Chun Yen ^a   Leu, Ching Chich ^b   Yang, Jung Yen ^b   Chuang, Shiow Huey ^b   Huang, Tiao Yuan ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Ferroelectric; Low pressure; Low temperature; PZT; Sol gel

Indexed keywords

ANNEALING; CRYSTALLIZATION; DESORPTION; ELECTRIC POTENTIAL; HYSTERESIS; LEAD COMPOUNDS; POLARIZATION; SOL-GELS;

LOW-VOLTAGE OPERATION;

THIN FILMS;

EID: 0038042576     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2756     Document Type: Article

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