Structure and humidity sensing properties of barium strontium titanate/silicon nanoporous pillar array composite films

Thin Solid Films

Volumn 517, Issue 2, 2008, Pages 929-932

  Xiao, Shun Hua ^a,b   Xu, Hai Jun ^c   Hu, Jin ^d   Jiang, Wei Fen ^b   Li, Xin Jian ^b  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b ZHENGZHOU UNIVERSITY   (China)

^c BEIJING UNIVERSITY OF CHEMICAL TECHNOLOGY   (China)

^d GUILIN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Barium strontium titanate; Hierarchical structure; Humidity sensing properties; Silicon nanoporous pillar array

Indexed keywords

ALKALINE EARTH METALS; ATMOSPHERIC HUMIDITY; BARIUM; COMPOSITE FILMS; HUMIDITY CONTROL; HUMIDITY SENSORS; METEOROLOGY; MOISTURE; SEMICONDUCTING SILICON COMPOUNDS; SENSOR NETWORKS; SENSORS; SILICON; STRONTIUM; STRONTIUM COMPOUNDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

ARRAY STRUCTURES; BARIUM STRONTIUM TITANATE; BARIUM STRONTIUM TITANATES; CAPACITIVE HUMIDITY SENSORS; COMPOSITE THIN FILMS; FAST RESPONSE TIMES; GOOD STABILITIES; HIERARCHICAL STRUCTURE; HIGH SENSITIVITIES; HUMIDITY SENSING; HUMIDITY SENSING PROPERTIES; INITIAL VALUES; NANOPOROUS; PILLAR ARRAYS; RELATIVE HUMIDITIES; RESPONSE TIMES; SENSING PERFORMANCES; SENSING PROPERTIES; SIGNAL FREQUENCIES; SILICON NANOPOROUS PILLAR ARRAY; SILICON NANOPOROUS PILLAR ARRAYS; THIN FILM COMPOSITIONS;

BARIUM TITANATE;

EID: 55049130414     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.06.072     Document Type: Article

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