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Volumn 51, Issue 9-11, 2011, Pages 1535-1539

An extension of the Curie-von Schweidler law for the leakage current decay in MIS structures including progressive breakdown

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED STRESS; CIRCUIT MODELS; CONSTANT VOLTAGE STRESS; CURRENT MAGNITUDES; CURRENT-TIME CHARACTERISTICS; EXPERIMENTAL DATA; LOCAL DEGRADATION; MIS STRUCTURE; OXIDE LAYER; PARALLEL RESISTANCE; PROGRESSIVE BREAKDOWN;

EID: 80052930481     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2011.06.035     Document Type: Conference Paper
Times cited : (12)

References (15)
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    • Jameson, J.R.1    Griffin, P.B.2    Plummer, J.D.3    Nishi, Y.4
  • 4
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    • S. Zafar, A. Callegari, E. Gusev, and M. Fischetti Charge trapping related threshold voltage instabilities in high permittivity gate dielectric stacks J Appl Phys 93 2003 9298 9303
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    • Zafar, S.1    Callegari, A.2    Gusev, E.3    Fischetti, M.4
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    • Dielectric relaxation and breakdown detection of doped tantalum oxide high-K thin films
    • W. Luo, Y. Kuo, and W. Kuo Dielectric relaxation and breakdown detection of doped tantalum oxide high-K thin films IEEE Trans Device Microelectron Reliab 4 2004 488 494
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    • Luo, W.1    Kuo, Y.2    Kuo, W.3
  • 9
    • 3042568667 scopus 로고    scopus 로고
    • A methodology for accurate assessment of soft-broken gate oxide leakage and the reliability of VLSI circuits
    • Mason P, La Duca A, Holder C, Alam M, Hwang D.A methodology for accurate assessment of soft-broken gate oxide leakage and the reliability of VLSI circuits. in: Proceedings IRPS; 2004, p. 430-4.
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    • Mason, P.1    La Duca, A.2    Holder, C.3    Alam, M.4    Hwang, D.5
  • 10
    • 75749093447 scopus 로고    scopus 로고
    • Degradation and breakdown characteristics of thin MgO dielectric layers
    • R. O'Connor, G. Hughes, P. Casey, and S. Newcomb Degradation and breakdown characteristics of thin MgO dielectric layers J Appl Phys 107 2010 024501
    • (2010) J Appl Phys , vol.107 , pp. 024501
    • O'Connor, R.1    Hughes, G.2    Casey, P.3    Newcomb, S.4
  • 13
    • 0013125857 scopus 로고
    • Kinetics of charge trapping in dielectrics
    • D. Wolters, and J. Van der Schoot Kinetics of charge trapping in dielectrics J Appl Phys 58 1985 831 837
    • (1985) J Appl Phys , vol.58 , pp. 831-837
    • Wolters, D.1    Van Der Schoot, J.2
  • 14
    • 0013020208 scopus 로고    scopus 로고
    • Oxide wearout, breakdown, and reliability
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  • 15
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    • 2 gate stacks grown on germanium based metal-oxide-semiconductor devices due to Maxwell-Wagner instabilities and dielectrics relaxation
    • 2 gate stacks grown on germanium based metal-oxide-semiconductor devices due to Maxwell-Wagner instabilities and dielectrics relaxation J Vac Sci Technol B 29 2011 01AB06
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.