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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 5, 2011, Pages

Ultrathin TiSiN overcoat protection layer for magnetic media

(6) Rose, Franck a Marchon, Bruno a Rawat, Vijay a Pocker, Daryl a Xiao, Qi Fan a Iwasaki, Tomio b

a SAN JOSE RESEARCH CENTER (United States)

b HITACHI LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-CORROSION; ANTICORROSION PERFORMANCE; FOURIER TRANSFORM INFRARED; INTERATOMIC INTERACTIONS; MAGNETIC MEDIA; OXYGEN DIFFUSION; OXYNITRIDES; PROTECTION LAYERS; REACTIVE MAGNETRON SPUTTERING; RECORDING MEDIA; ULTRA-THIN; X RAY REFLECTIVITY;

AMORPHOUS SILICON; CORROSION PROTECTION; CORROSION RESISTANCE; FOURIER TRANSFORMS; HYDROLYSIS; MAGNETIC MATERIALS; MOLECULAR DYNAMICS; PHOTOELECTRON SPECTROSCOPY; SILICON; SILICON NITRIDE; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ABSORPTION SPECTROSCOPY;

EID: 80052393533 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3607423 Document Type: Article

Times cited : (22)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.