Application of molecular-dynamics simulation to interface stabilization in thin-film devices

JSME International Journal, Series B: Fluids and Thermal Engineering

Volumn 47, Issue 3, 2004, Pages 470-476

  Iwasaki, Tomio ^a  

^a HITACHI LTD   (Japan)

Author keywords

Interface diffusion; Molecular dynamics; Nanotechnology; Thin film

Indexed keywords

ADHESION; COMPUTER SIMULATION; COPPER; CRYSTAL ORIENTATION; DIELECTRIC MATERIALS; DIFFUSION; INTERFACES (MATERIALS);

BARRIER UNDERLAYERS; INTERCONNECTS; INTERFACE DIFFUSION; INTERFACIAL LAYERS;

MOLECULAR DYNAMICS;

NANOTECHNOLOGY;

EID: 5444221212     PISSN: 13408054     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmeb.47.470     Document Type: Article

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