Observation of incident angle dependent phonon absorption in hydrogenated amorphous silicon nitride thin films

Applied Physics Letters

Volumn 73, Issue 26, 1998, Pages 3866-3868

  Li, Tong ^a   Kanicki, Jerzy ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012893214     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122919     Document Type: Article

References (19)

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