A high-precision dual-servo stage using halbach linear active magnetic bearings

IEEE/ASME Transactions on Mechatronics

Volumn 16, Issue 5, 2011, Pages 925-931

  Choi, Young Man ^a,b   Gweon, Dae Gab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Electromagnets; magnetic levitation; motion control

Indexed keywords

ACTIVE MAGNETIC BEARING; CAPACITIVE SENSOR; CONSTANT VELOCITIES; GRAVITY COMPENSATION; HALBACH; HIGH-PRECISION; HIGH-PRECISION POSITION; IN-PLANE MOTION; LASER INTERFEROMETER; LORENTZ; OUT-OF-PLANE MOTION; PERMANENT MAGNET ARRAY; TRACKING ERRORS; VERTICAL MOTIONS; VOICE COIL MOTORS;

ACTIVE NETWORKS; BEARINGS (STRUCTURAL); INTERFEROMETERS; JITTER; LASER INTERFEROMETRY; MAGNETIC AMPLIFIERS; MAGNETIC BEARINGS; MAGNETIC LEVITATION VEHICLES;

MAGNETIC LEVITATION;

EID: 80052362578     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2010.2056694     Document Type: Article

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