Design and control of a nanoprecision XYΘ scanner

Review of Scientific Instruments

Volumn 79, Issue 4, 2008, Pages

  Choi, Young Man ^a   Kim, Jung Jae ^a   Kim, Jinwoo ^b   Gweon, Dae Gab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Soonhan Engineering   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; MOTORS; SENSORS; THERMAL EXPANSION; TIME DELAY; VISCOELASTICITY;

STRUCTURAL STABILITY; STRUCTURAL STIFFNESS; TIME DELAY CONTROL ALGORITHM; VOICE COIL MOTORS;

MACHINE DESIGN;

EID: 42949140941     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2902276     Document Type: Article

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