Six degrees of freedom Mag-Lev stage development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 856-867

  Williams, Mark ^a   Faill, Peter ^a   Bischoff, Paul M ^a   Tracy, Steven P ^a   Arling, Bill ^a  

^a Integrated Solutions Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); PERFORMANCE; POSITION MEASUREMENT;

MEG-LEV STAGE; OPTICAL MICROLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0031355273     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276006     Document Type: Conference Paper

References (5)