Ultra precision motion control of a multiple degrees of freedom magnetic suspension stage

IEEE/ASME Transactions on Mechatronics

Volumn 7, Issue 1, 2002, Pages 67-78

  Shan, Ximin ^a   Kuo, Shih Kang ^a   Zhang, Jihua ^a   Menq, Chia Hsiang ^a  

^a The Ohio State University   (United States)

Author keywords

2 DOF control; Electromagnetic force modeling; Feedback linearization; H synthesis; Magnetic suspension; Robust control

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); ELECTROMAGNETS; FEEDBACK CONTROL; LASER APPLICATIONS; NONLINEAR CONTROL SYSTEMS; ROBUSTNESS (CONTROL SYSTEMS); STABILIZATION;

MAGNETIC SUSPENSION STAGE (MSS);

MOTION CONTROL;

EID: 0036493562     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.990889     Document Type: Article

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