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Review of Scientific Instruments

Volumn 80, Issue 4, 2009, Pages

A new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage

(4) Choi, Young Man a,d Lee, Moon G b Gweon, Dae Gab a Jeong, Jaehwa c

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

b Ajou University (South Korea)

c Korea University (South Korea)

d NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE MAGNETIC BEARINGS; COMPLEMENTARY CHARACTERISTICS; ELECTRO-MAGNETIC ACTUATORS; ELECTROMAGNETIC LEVITATIONS; HALBACH; HALBACH MAGNET ARRAYS; HIGH PRECISION POSITIONING; HIGH PRECISION STAGES; HIGH-VACUUM CONDITIONS; LEVITATING FORCES; LEVITATION FORCES; NEXT-GENERATION LITHOGRAPHIES; NONCONTACT; PARTICLE GENERATIONS; STATE-OF-THE-ART TECHNOLOGIES;

BEARINGS (STRUCTURAL); GRAVITATION; MAGNETIC BEARINGS; MAGNETIC LEVITATION VEHICLES; MAGNETIC MATERIALS; MAGNETISM; MAGNETS; VACUUM;

MAGNETIC LEVITATION;

EID: 65449162312 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3116482 Document Type: Article

Times cited : (40)

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