Temporal behaviour of the e to H mode transition in an inductively coupled argon discharge

Plasma Sources Science and Technology

Volumn 15, Issue 3, 2006, Pages 378-383

  Kempkes, P ^a   Singh, S V ^a   Pargmann, C ^a   Soltwisch, H ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; LIGHT EMISSION;

INDUCTION COILS; INPUT POWER; MODE TRANSITION;

ARGON;

EID: 33745599379     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/3/011     Document Type: Article

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