NEMS diaphragm sensors integrated with triple-nano-ring resonator

Sensors and Actuators, A: Physical

Volumn 172, Issue 1, 2011, Pages 61-68

  Li, Bo ^a   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Filters; Photonic crystal; Ring resonators; Sensors

Indexed keywords

APPLIED FORCES; APPLIED LOADS; APPLIED PRESSURE; CIRCULAR DIAPHRAGMS; MICRO-FORCE SENSORS; NANO SCALE; NORMAL DIRECTION; ORDER POLYNOMIALS; Q-FACTORS; RED SHIFT; RESONANT PEAKS; RESONANT WAVELENGTHS; RING RESONATOR; WAVELENGTH SHIFT;

CRYSTAL FILTERS; DIAPHRAGMS; FILTERS (FOR FLUIDS); NANORINGS; OPTICAL RESONATORS; PHOTONIC CRYSTALS; PRESSURE SENSORS; SENSORS; SILICON;

NANOSENSORS;

EID: 80052027252     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.02.028     Document Type: Conference Paper

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