Nanogrinding of multi-layered thin film amorphous Si solar panels

International Journal of Machine Tools and Manufacture

Volumn 51, Issue 10-11, 2011, Pages 797-805

  Sumitomo, Taro ^a   Huang, Han ^a   Zhou, Libo ^b   Shimizu, Jun ^b  

^a UNIVERSITY OF QUEENSLAND   (Australia)

^b IBARAKI UNIVERSITY   (Japan)

Author keywords

Deformation; Material removal; Multi layer; Nanogrinding; Solar panel

Indexed keywords

AMORPHOUS SI; DUCTILE MATERIALS; EDGE CHIPPING; HARD AND BRITTLE MATERIALS; MACHINING PROCESS; MATERIAL REMOVAL; MULTI-LAYERED; MULTILAYER STRUCTURES; NANO SCALE; NANO-GRINDING; NANOMETRICS; NANOSCRATCHING; SOLAR PANELS; SURFACE CHARACTERISTICS; THIN FILM INTERFACES;

AMORPHOUS FILMS; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; INTERFACES (MATERIALS); MACHINING; SEMICONDUCTING SILICON COMPOUNDS; SOLAR CONCENTRATORS; STRIPPING (REMOVAL); SURFACE ROUGHNESS; SURFACES; THIN FILMS;

AMORPHOUS MATERIALS;

EID: 80052021638     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2011.07.001     Document Type: Article

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