Brittle materials in nano-abrasive fabrication of optical mirror-surfaces

Precision Engineering

Volumn 32, Issue 4, 2008, Pages 336-341

  Yin, Ling ^a   Huang, Han ^b  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b UNIVERSITY OF QUEENSLAND   (Australia)

Author keywords

Brittle materials; Brittleness; Fabrication; Nanometer roughness; Optical mirror surface

Indexed keywords

ABRASIVES; AMORPHOUS SILICON; BRITTLENESS; CLADDING (COATING); FRACTURE MECHANICS; GRINDING (COMMINUTION); GRINDING (MACHINING); GRINDING MILLS; MIRRORS; NONMETALS; OPTICAL DESIGN; OPTICAL GLASS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICON; SILICON CARBIDE; SULFUR COMPOUNDS; SURFACE ROUGHNESS; SURFACES; TUNGSTEN; TUNGSTEN CARBIDE; ZIRCONIA;

AMORPHOUS GLASSES; BRITTLE MATERIALS; EXPONENTIAL LAWS; FABRICATION; MATE RIAL PROPERTIES; NANO-FABRICATION; NANOMETER ROUGHNESS; OPTICAL MIRROR SURFACE; OPTICAL MIRRORS; PHASE TRANSFORMATION; POLY-CRYSTALLINE; POLYCRYSTALLINE SILICON CARBIDE; ROUGH SURFACES; SIC(0 0 0 1); SURFACE QUALITIES; ULTRA-PRECISION GRINDING; WHITE-LIGHT INTERFEROMETRY;

AMORPHOUS MATERIALS;

EID: 48549089456     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.09.001     Document Type: Article

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