Investigation of mechanical properties of transparent conducting oxide thin films

Thin Solid Films

Volumn 443, Issue 1-2, 2003, Pages 60-65

  Zeng, Kaiyang ^a   Zhu, Furong ^a   Hu, Jianqiao ^a   Shen, Lu ^a   Zhang, Keran ^a   Gong, Hao ^b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Elastic properties; Hardness; Indium tin oxide; Indium zinc oxide; Nano indentation

Indexed keywords

CERAMIC MATERIALS; ELASTIC MODULI; HARDNESS; HYDROGEN; INDENTATION; INDIUM COMPOUNDS; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; POROSITY; ZINC OXIDE;

NANO-INDENTATION;

THIN FILMS;

EID: 0141642131     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00915-5     Document Type: Article

References (25)

1. Chropra K.L., Major S., Pandya D.K. Thin Solid Films. 102:1983;1.
2. Zhu F., Fuyuki T., Matsunami H., Singh J. Solid Energy Mater. Solid C. 39:1995;1.
3. Lee B.H., Kim I.G., Cho S.W., Lee S.H. Thin Solid Films. 302:1997;25.
4. Zhang J., Hu J.Q., Zhu F., Gong H., O'Shea S.J. Sens. Actuat. B-Chem. 87:2002;159.
5. Zhu F., Low B.L., Zhang K., Chua S.J. Appl. Phys. Lett. 79:2001;1205.
6. Low B.L., Zhu F., Zhang K., Chua S.J. Appl. Phys. Lett. 80:2002;4659.
7. Wu C.C., Wu C.I., Sturm J.C., Kahn A. Appl. Phys. Lett. 70:1997;1348.
8. Wu W.F., Chiou B.S. Thin Solid Films. 293:1997;244.
9. Wu W.F., Chiou B.S. Appl. Surf. Sci. 115:1997;96.
10. Wu W.F., Chiou B.S. Semicond. Sci. Technol. 11:1996;196.
11. Pethica J.B., Hutchings R., Oliver W.C. Philos. Mag. A. 48:1983;593.
12. Loubet J.L., Georges J.M., Marchesini O., Meille G. J. Tribol.-T ASME. 106:1984;43.
13. Doerner M.F., Nix W.D. J. Mater. Res. 1:1986;601.
14. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;613.
15. Zhang K., Zhu F., Huan C.H.A., Wee A.T.S. Thin Solid Films. 376:2000;255.
16. Zhang K., Zhu F., Huan C.H.A., Wee A.T.S. J. Appl. Phys. 86:1999;974.
17. Hainsworth S.V., Chandle H.W., Page T.F. J. Mater. Res. 11:1996;1987.
18. Page T.F., Pharr G.M., Hay J.C., Oliver W.C., Lucas B.N., Herbert E., Riester L. Mater. Res. Soc. Symp. Proc. 522:1998;53.
19. McGurk M.R., Page T.F. J. Mater. Res. 14:1999;2283.
20. Kusano E., Kashiwagi N., Kobayashi T., Nanto H., Kondo I., Kinbara A. Vacuum. 51:1998;785.
21. Naghavi N., Rougier A., Marcel C., Guery C., Leriche J.B., Tarascon J.M. Thin Solid Films. 360:2000;233.
22. Davidge R.W. Mechanical Behaviour of Ceramics. 1980;Cambridge University Press.
23. Wachtman J.B. Mechanical Properties of Ceramics. 1996;John Wiley and Sons, Inc.
24. Ramakrishnan N., Arunachalam V.S. J. Am. Ceram. Soc. 76:1993;2745.
25. Rice R.W. J. Am. Ceram. Soc. 76:1993;1801.