Optoelectrical detection system using porous silicon-based optical multilayers

IEEE Sensors Journal

Volumn 11, Issue 10, 2011, Pages 2413-2420

  Kovacs, Andras ^a   Jonnalagadda, Prasad ^a   Mescheder, Ulrich ^a  

^a FURTWANGEN UNIVERSITY   (Germany)

Author keywords

Optical multilayer; optoelectronic and photonic sensors; porous silicon; refractive index

Indexed keywords

ANALYTES; DETECTION SYSTEM; HIGH POROSITY; HYDROPHILIC SURFACES; ILLUMINATION SYSTEM; LOW-COST OPTICAL SENSOR; MESOPOROUS; MULTILAYER STRUCTURES; OPTOELECTRICAL; OPTOELECTRONIC AND PHOTONIC SENSORS; ORGANIC ANALYTES; OXIDIZED POROUS SILICON; PORE FORMATION; POROUS SILICON LAYERS; PROCESS PARAMETERS; SILICON MULTILAYERS; SILICON-BASED; SUBSTRATE MATERIAL; THERMAL OXIDATION; WETTING BEHAVIOR; WIDE-BAND;

ADSORPTION; LIGHT EMITTING DIODES; LIQUIDS; MORPHOLOGY; MULTILAYERS; OPTICAL SENSORS; OXIDATION; PHOSPHORUS; PORE SIZE; POROUS SILICON; REFRACTIVE INDEX; SUBSTRATES; SURFACE TREATMENT;

OPTICAL MULTILAYERS;

EID: 80051900366     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2119310     Document Type: Article

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