Characterization of porous silicon based optical sensor system for biosensor applications

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 21-26

  Kovacs, A ^a   Jonnalagadda, P ^a   Meng, X Y ^a   Mescheder, U ^a  

^a FURTWANGEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTES; BIOSENSOR APPLICATIONS; DOPED SUBSTRATES; HIGH POROSITY; HYDROPHILIC SURFACES; LOW-COST OPTICAL SENSOR; MESOPOROUS; MULTILAYER STRUCTURES; ORGANIC ANALYTES; OXIDIZED POROUS SILICON; PORE FORMATION; POROUS SILICON LAYERS; PROCESS PARAMETERS; SUBSTRATE MATERIAL; THERMAL OXIDATION; WETTING BEHAVIOR;

ADSORPTION; BIOSENSORS; LIGHT SOURCES; LIQUIDS; MORPHOLOGY; MULTILAYERS; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; OPTICAL SENSORS; OXIDATION; PHOSPHORUS; PORE SIZE; SUBSTRATES; SURFACE TREATMENT;

POROUS SILICON;

EID: 77951100706     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398128     Document Type: Conference Paper

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