Investigation of humidity adsorption in porous silicon layers

Physica Status Solidi (A) Applications and Materials Science

Volumn 206, Issue 6, 2009, Pages 1343-1347

  Kovacs, Andras ^a   Meister, Dirk ^b   Mescheder, Ulrich ^a  

^a FURTWANGEN UNIVERSITY   (Germany)

^b Rubotherm Prazisionsmesstechnik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION MEASUREMENT; AIR QUALITY MEASUREMENTS; BET MODEL; ELECTRICAL PARAMETER; HUMIDITY ADSORPTION; HUMIDITY SENSING; IMPEDANCE SPECTROSCOPY; POROUS LAYERS; POROUS SI; POROUS SILICON BASED HUMIDITY SENSOR; POROUS SILICON LAYERS; ROOM TEMPERATURE; SURFACE EFFECT; WATER VAPOR ADSORPTION;

AIR QUALITY; ANGLE MEASUREMENT; ATMOSPHERIC TEMPERATURE; ATMOSPHERICS; CONTACT ANGLE; GAS ADSORPTION; HUMIDITY CONTROL; HUMIDITY SENSORS; MOISTURE; OXIDATION; PORE SIZE; SIGNAL PROCESSING; WATER VAPOR;

POROUS SILICON;

EID: 67649959743     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200881106     Document Type: Article

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