Electrochemical preparation of a rugate filter in silicon and its deviation from the ideal structure

Journal of Applied Physics

Volumn 101, Issue 6, 2007, Pages

  Salem, M S ^a   Sailor, M J ^b   Sakka, T ^a   Ogata, Y H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCH RATES; PERIODIC PSEUDO SINUSOIDAL VARIATION; POROUS SILICON RUGATE FILTERS (PSRF); SINUSOIDAL CURRENT DENSITY WAVEFORMS;

ANODIC OXIDATION; CURRENT DENSITY; ETCHING; HYDROFLUORIC ACID; REFRACTIVE INDEX; WAVEFORM ANALYSIS;

POROUS SILICON;

EID: 34047135538     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2710339     Document Type: Article

References (40)

1. A. Uhlir, Bell Syst. Tech. J. 35, 333 (1956).
2. H. Sohn, S. Létant, M. J. Sailor, and W. C. Trogler, J. Am. Chem. Soc. 122, 5399 (2000).
3. V. Lehmann, R. Stengl, H. Reisinger, R. Detemple, and W. Theiss, Appl. Phys. Lett. 78, 589 (2001).
4. L. T. Canham, M. P. Stewart, J. M. Buriak, C. L. Reeves, M. Anderson, E. K. Squire, P. Allcock, and P. A. Snow, Phys. Status Solidi A 182, 521 (2000).
5. F. Cunin, T. A. Schmedake, J. R. Link, Y. Y. Li, J. Koh, S. N. Bhatia, and M. J. Sailor, Nat. Mater. 1, 39 (2002).
6. I. Ronga, A. Bsiesy, F. Gaspard, R. Hérino, M. Ligeon, F. Muller, and A. Halimaoui, J. Electrochem. Soc. 138, 1403 (1991).
7. S. O. Meade, M. S. Yoon, K. H. Ahn, and M. J. Sailor, Adv. Mater. (Weinheim, Ger.) 16, 1811 (2004).
8. S. Setzu, S. Létant, P. Solsona, R. Romestain, and J. C. Vial, J. Lumin. 80, 129 (1998).
9. L. Tsybeskov, Ju. V. Vandyshev, and P. M. Fauchet, Phys. Rev. B 49, 7821 (1994).
10. P. A. Snow, E. K. Squire, P. St. J. Russell, and L. T. Canham, J. Appl. Phys. 86, 1781 (1999).
11. T. Gao, J. Gao, and M. J. Sailor, Langmuir 18, 9953 (2002).
12. S. Content, W. C. Trogler, and M. J. Sailor, Chem.-Eur. J. 6, 2205 (2000).
13. H. Sohn, S. Letant, M. J. Sailor, and W. C. Trogler, J. Am. Chem. Soc. 122, 5399 (2000).
14. V. Pellegrini, A. Tredicucci, C. Mazzoleni, and L. Pavesi, Phys. Rev. B 52, R14328 (1995).
15. S. Nagata, C. Domoto, T. Nishimura, and K. Iwameji, Appl. Phys. Lett. 72, 2945 (1998).
16. D. Hunkel, M. Marso, R. Butz, R. Arens-Fisher, and H. Lüth, Mater. Sci. Eng., B 69-70, 100 (2000).
17. St. Frohnhoff, M. G. Berger, M. Thönissen, C. Dieker, L. Vescan, H. Münder, and H. Lüth, Thin Solid Films 255, 59 (1995).
18. H. A. Lopez and P. M. Fauchet, Appl. Phys. Lett. 77, 3704 (2000).
19. G. Vincent, Appl. Phys. Lett. 64, 2367 (1994).
20. B. G. Bovard, Appl. Opt. 32, 5427 (1993).
21. M. G. Berger, R. Arens-Fischer, M. Thönissen, M. Krüger, S. Billat, H. Lüth, S. Hilbi-ich, W. Theiß, and P. Grosse, Thin Solid Films 297, 237 (1997).
22. M. Thönissen, M. G. Berger, W. Theiss, S. Hilbrich, M. Krüger, and H. Lüth, Solid State Phenom. 45, 65 (1997).
23. J. R. Dorvee, A. M. Derfus, S. N. Bhatia, and M. J. Sailor, Nat. Mater. 3, 896 (2004).
24. E. Lorenzo, C. J. Oton, N. E. Capuj, M. Ghulinyan, D. Navarro-Urrios, Z. Gaburro, and L. Pavesi, Phys. Status Solidi C 2, 3227 (2005).
25. M. S. Salem, M. J. Sailor, F. A. Harraz, T. Sakka, and Y. H. Ogata, Phys. Status Solidi C (in press).
26. S. Setzu, P. Ferrand, and R. Romestain, Mater. Sci. Eng., B 69-70, 34 (2000).
27. E. Haimi, V. K. Lindroos, and R. Nowak, J. Nanosci. Nanotechnol. 1, 201 (2001).
28. W. Theiss, in Festkörperprobleme/Advances in Solid State Physics, Vol. 33, edited by R. Helbig (Vieweg, Braunschweig, 1994), p.149.
29. S. Setzu, G. Lérondel, and R. Romestain, J. Appl. Phys. 84, 3129 (1998).
30. usG. Lérondel, R. Romestain, and S. Barret, J. Appl. Phys. 81, 6171 (1997).
31. C. Pacholski, M. Sartor, M. J. Sailor, F. Cunin, and G. M. Miskelly, J. Am. Chem. Soc. 127, 11636 (2005).
32. C. Pacholski, C. Yu, G. M. Miskelly, D. Godin, and M. J. Sailor, J. Am. Chem. Soc. 128, 4250 (2006).
33. S. Ilyas, T. Böcking, K. Kilian, P. J. Reece, J. Gooding, K. Gaus, and M. Gal, Opt. Mater. (Amsterdam, Neth.) 29, 619 (2007).
34. M. Born and E. Wolf, Principle of Optics (Pergamon, Oxford, 1980).
35. M. Thönissen, M. G. Berger, S. Billat, R. Arens-Fischer, M. Krüger, H. Lüth, W. Theiß, S. Hillbrich, P. Grosse, G. Lerondel, and U. Frotscher, Thin Solid Films 297, 92 (1997).
36. W. Theiß, M. Amtez, S. Hilbrich, M. Wernke, R. Arens-Fischer, and M. G. Berger, Phys. Status Solidi B 190, 15 (1995).
37. M. S. Salem, M. J. Sailor, F. A. Harraz, T. Sakka, and Y. H. Ogata, J. Appl. Phys. 100, 083520 (2006).
38. S. J. Gregg and K. S. W. Sing, Adsorption, Surface Area and Porosity, 2nd ed. (Academic Press, London, 1982), p. 112.
39. J. Dorvee and M. J. Sailor, Phys. Status Solidi A 202, 1619 (2005).
40. J. Gao, T. Gao, and M. J. Sailor, Appl. Phys. Lett. 77, 901 (2000).