Hetero-epitaxy of SrTiO3 on Si and control of the interface

Thin Solid Films

Volumn 515, Issue 16 SPEC. ISS., 2007, Pages 6332-6336

  Delhaye, G ^a   El Kazzi, M ^a   Gendry, M ^a   Hollinger, G ^a   Robach, Y ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

Integration on Si; Molecular beam epitaxy; SrTiO3

Indexed keywords

CRYSTALLIZATION; EPITAXIAL GROWTH; HIGH ENERGY ELECTRON DIFFRACTION; INTERFACES (MATERIALS); MOLECULAR BEAM EPITAXY; X RAY PHOTOELECTRON SPECTROSCOPY;

HOMO-EPITAXIAL GROWTH; INTEGRATION ON SI;

STRONTIUM COMPOUNDS;

EID: 34247469738     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.187     Document Type: Article

References (8)

1. McKee R.A., Walker F.J., and Chisholm M.F. Phys. Rev. Lett. 81 (1998) 3014
2. Tambo T., Maeda K., Shimizu A., and Tatsuyama C. J. Appl. Phys. 86 (1999) 3213
3. Lettieri J., Haeni J.H., and Schlom D.G. J. Vac. Sci. Technol., A, Vac. Surf. Films 20 (2002) 1332
4. Yu Z., Liang Y., Overgaard C., Hu X., Curless J., Li H., Wei Y., Craigo B., Jordan D., Droopad R., Finder J., Eisenbeiser K., Marshall D., Moore K., Kulik J., and Fejes P. Thin Solid Films 51 (2004) 462
5. Li H., Hu X., Wei Y., Yu Z., Zhang X., Droopad R., Demkov A.A., Edwards Jr. J., Moore K., Ooms W., Kulik J., and Fejes P. J. Appl. Phys. 93 (2003) 4521
6. Norga G.J., Marchiori C., Rossel C., Guiller A., Locquet J.P., Siegwart H., Caimi D., Fompeyrine J., Seo J.W., and Dieker Ch. J. Appl. Phys. 99 (2006) 084102
7. Wei Y., Hu X., Liang Y., Jordan D.C., Craigo B., Droopad R., Yu Z., Demkov A., Edwards Jr. J., and Ooms W.J. J. Vac. Sci. Technol. B 20 (2002) 1402
8. Droopad R., Yu Z., Li H., Liang Y., Overgaard C., Demkov A., Zhang X., Moore K., Eisenbeiser K., Hu M., Curless J., and Finder J. J. Cryst. Growth 251 (2003) 638