Angular dependence of the ion-induced secondary electron emission for He + and Ga + beams

Microscopy and Microanalysis

Volumn 17, Issue 4, 2011, Pages 624-636

  Castaldo, Vincenzo ^a   Withagen, Josephus ^a   Hagen, Cornelius ^a   Kruit, Pieter ^a   Van Veldhoven, Emile ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TNO   (Netherlands)

Author keywords

angular dependency; FIB; He microscope; image formation; secondary emission

Indexed keywords

EID: 80051825423     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927611000225     Document Type: Article

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