Variation of Rutherford Backscattered Ion and ion-induced secondary electron yield with atomic number in the "Orion" scanning helium ion microscope

Microscopy and Microanalysis

Volumn 14, Issue SUPPL. 2, 2008, Pages 1190-1191

  Griffin, B J ^a   Joy, D ^b  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 49549102834     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927608088600     Document Type: Conference Paper

References (3)

1. B.J. Griffin et al., Proc. ACMM-20 & IUMAS-IV (2008) 154.
2. Suzuki et al., Microscopy Today 16 (2008) 6.
3. The strong support of Carl Zeiss SMT and the ALIS group, and particularly Lewis Stern and Clarke Fenner for collecting the image data is gratefully aknowledged.