Ion beam nanopatterning and micro-Raman spectroscopy analysis on HOPG for testing FIB performances

Ultramicroscopy

Volumn 111, Issue 8, 2011, Pages 1338-1342

  Archanjo, B S ^a   Maciel, I O ^c   Martins Ferreira, E H ^a   Peripolli, S B ^a   Damasceno, J C ^a   Achete, C A ^a,b   Jorio, A ^a,c  

^a INSTITUTO NACIONAL DE METROLOGIA   (Brazil)

^b FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^c FEDERAL UNIVERSITY OF MINAS GERAIS   (Brazil)

Author keywords

Focused ion beam; HOPG; Metrology; Raman spectroscopy

Indexed keywords

DISTRIBUTION OF IONS; FLUENCES; GEOMETRICAL MODELS; GRAPHITE SURFACES; HIGH-RESOLUTION SCANNING ELECTRON MICROSCOPIES; HIGHLY ORIENTED PYROLYTIC GRAPHITE; HOPG; ION BEAM OPTICS; ION DOSE; ION-BEAM NANOPATTERNING; LOW DOSE; METROLOGICAL TOOLS; MICRO RAMAN SPECTROSCOPY; MODIFICATION OF MATERIALS; NEW PROTOCOL; SEMI-QUANTITATIVE ANALYSIS; SQUARE ARRAY; WRITING SPEED;

ATOMIC FORCE MICROSCOPY; BEAM PLASMA INTERACTIONS; FOCUSED ION BEAMS; GRAPHITE; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BOMBARDMENT; OPTICS; PYROLYSIS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPECTRUM ANALYSIS;

IONS;

GALLIUM; GRAPHITE; HIGHLY ORIENTED PYROLYTIC GRAPHITE; NANOMATERIAL; UNCLASSIFIED DRUG;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL INTERACTION; CONTROLLED STUDY; FOCUSED ION BEAM NANOPATTERNING; MICRO RAMAN SPECTROMETRY; NANOTECHNOLOGY; OPTICS; QUANTITATIVE ANALYSIS; RAMAN SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS;

EID: 80051806582     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2011.04.007     Document Type: Article

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