The effects of aluminium composition on the mechanical properties of reactivity sputtered TiAlN films

Journal of Materials Science

Volumn 33, Issue 8, 1998, Pages 2137-2145

  Lii, Ding Fwu ^a  

^a Chinese Naval Academy Kaohsiung   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; COMPOSITION EFFECTS; CUTTING TOOLS; HARDNESS; OXIDATION RESISTANCE; SPUTTER DEPOSITION; TITANIUM ALLOYS; WEAR RESISTANCE;

REACTIVE SPUTTERING;

METALLIC FILMS;

EID: 0032045554     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004327421261     Document Type: Article

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