A MIM diode with ultra abrupt switching process and high on/off current ratio

ECS Transactions

Volumn 35, Issue 4, 2011, Pages 923-929

  Zhang, Lijie ^a   Huang, Ru ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIODES; LEAKAGE CURRENTS; METAL INSULATOR BOUNDARIES; SILICA; SILICON NITRIDE;

ESD PROTECTION DEVICES; FABRICATION PROCESS; HIGH TEMPERATURE PROCESS; LOW-LEAKAGE CURRENT; METAL INSULATOR METALS; ON/OFF CURRENT RATIO; SPUTTERING METHODS; SWITCHING VOLTAGES;

MIM DEVICES;

EID: 79960873295     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3572329     Document Type: Conference Paper

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