Indirect identification and compensation of lateral scanner resonances in atomic force microscopes

Nanotechnology

Volumn 22, Issue 31, 2011, Pages

  Burns, D J ^a   Youcef Toumi, K ^a   Fantner, G E ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ALTERNATIVE APPROACH; AT-SPEED; ATOMIC FORCE MICROSCOPES; COMMAND SIGNAL; DIRECT MEASUREMENT; EXTERNAL SENSORS; FEED-FORWARD CONTROLLERS; HIGH-SPEED OPERATION; HIGH-SPEED PERFORMANCE; IMAGING SPEED; INDIRECT IDENTIFICATION; INPUT SHAPERS; INPUT SIGNAL; INPUT-SHAPING; MECHANICAL SCANNER; MINIMAL MODEL; MODEL-BASED CONTROLLER; NANO-POSITIONING; OFFLINE SYSTEMS; OUT-OF-PLANE DIRECTION; ROBUSTNESS TO MODELING ERRORS; SCAN RATES; SPECTRAL COMPONENTS; TRADE OFF;

ATOMIC FORCE MICROSCOPY; CONTROLLERS; EXPERIMENTS; INSTRUMENT ERRORS; MICROSCOPES; RESONANCE; SENSORS; SPEED;

SCANNING;

EID: 79960752115     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/31/315701     Document Type: Article

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