Imaging of specimens at optimized low and very low energies in scanning electron microscopes

Scanning

Volumn 23, Issue 6, 2001, Pages 379-394

  Mullerova I ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Contrast mechanisms; Low electron energies; Scanning electron microscope

Indexed keywords

CATHODES; ELECTRON BEAMS; IMAGING TECHNIQUES; LENSES; MICROSCOPES; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY;

SPATIAL RESOLUTION;

ELECTRON ENERGY LEVELS;

ACCELERATION; APPARATUS; ARTICLE; CONTRAST; CONTRAST ENHANCEMENT; ELECTRIC POTENTIAL; ELECTRON BEAM; HUMAN; IMAGE ENHANCEMENT; LENS; OPTICAL RESOLUTION; PRIORITY JOURNAL; RELIABILITY; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY; VISIBILITY;

EID: 0035199366     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950230605     Document Type: Article

References (51)

1. Backscattered electron imaging using a single crystal scintillator detector
2. Addition of different contributions to the charged particle probe size
3. Electron structure of crystals from VLEED
4. Low energy electron microscopy
5. Low-voltage probe forming columns for electrons
6. Some physical descriptions of the charging effects of insulators under incident particle bombardment
7. Towards the ultimate scanning electron microscope
8. Monte Carlo modelling of electron interaction with solids including cascade secondary electron production
9. A comparison of diffraction techniques in the Sem
10. Combination of scanning Auger and very low energy electron microscopy
11. Compositional imaging in scanning Auger microscopy
12. Real image resolution of SEM and low-energy SEM and its optimisation: Distribution width of the total surface emission
13. Width of the SEM and LESEM response function as a tool for image resolution assessment
14. Wave-optical contrasts in SEM
15. The scanning low-energy electron microscope: First attainment of diffraction contrast in the scanning electron microscope
16. Microscopy with slow electrons
17. Scanning electron microscopy of non-conductive specimens at critical energies in a cathode lens system
18. Compound magnetic and electrostatic lenses for low-voltage applications
19. An introduction to Monte Carlo simulations
20. Low voltage scanning electron microscopy
21. Signal detection near the critical energy of noncharging illumination in a low-energy SEM equipped with a cathode lens
22. Charging potential and secondary emission of bodies under electron irradiation
23. Electron optical properties of a cathode lens
24. Optical properties and axial aberration coefficients of the cathode lens in combination with a focusing lens
25. Techniques for low voltage scanning electron microscopy line-width measurements
26. Ultra-high resolution SEM - New approach
27. Electron emission microscopy
28. Very low energy microscopy in commercial SEMs
29. Use of cathode lens in scanning electron microscope for low voltage applications
30. Some approaches to low-voltage scanning electron microscopy
31. The scanning very-low energy electron microscope (SVLEEM)
32. Low-energy SEM imaging of bevelled multi-layers
33. Low voltage scanning electron microscopy
34. LVSEM for high resolution topographic and density contrast imaging
35. The development of field-emission scanning electron microscopy for imaging biological surfaces
36. Unconventional imaging of surface relief
37. Electron optics of low-voltage electron beam testing and inspection. Part I: Simulation Tools
38. Low-energy electron-beam lithography
39. The relationship between accelerating voltage and electron detection modes to line width measurement in an SEM
40. Procedures for minimizing the aberrations of electromagnetic compound lenses
41. Measuring the backscattering coefficient and secondary electron yield inside a scanning electron microscope
42. Charging of bulk specimens, insulating layers and free-supporting films in scanning electron microscopy
43. Low voltage field emission SEM and microanalysis of multilayer films
44. Measurement of elastically reflected electrons (e<2.5 kev) for imaging of surfaces in a simple ultra high vacuum scanning electron microscope
45. Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids
46. Recent advances in understanding specimen charging
47. A review of the Zr0/W Schottky cathode
48. Recent developments in scanning electron microscopy
49. Generation and applications of finely focused beams of low-energy electrons
50. Correction of spherical and chromatic aberrations in a LVSEM
51. Measurements of very low energy Secondary and backscattered electron coefficients