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Volumn 19, Issue 7, 1997, Pages 498-504

A novel method for the discharge of electrostatic mirror formations in the scanning electron microscope

Author keywords

Beam voltage control; Electrostatic mirror discharge; Insulating specimens; Specimen current; Voltage control

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; ELECTRON SCATTERING; ION BEAMS; MONTE CARLO METHODS;

EID: 0031251747     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950190708     Document Type: Article
Times cited : (3)

References (11)
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    • Environmental and conventional SEM imaging of electron-sensitive resist: Contrast quality and metrological applications
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    • (1992) Microelectr Engin , vol.17 , pp. 455-458
    • Peters, K.R.1    Firstein, L.A.2    Noz, A.3
  • 9
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    • Measurement of fibre potentials in a scanning electron microscope
    • Weitzenkamp LA: Measurement of fibre potentials in a scanning electron microscope. Appl Phys Lett 2, 561-564 (1969)
    • (1969) Appl Phys Lett , vol.2 , pp. 561-564
    • Weitzenkamp, L.A.1
  • 11
    • 0028799461 scopus 로고
    • Charging control using pulsed scanning electron microscopy
    • Wong WK, Phang JCH, Thong JTL: Charging control using pulsed scanning electron microscopy. Scanning 17, 312-315 (1995)
    • (1995) Scanning , vol.17 , pp. 312-315
    • Wong, W.K.1    Phang, J.C.H.2    Thong, J.T.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.