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Volumn 109, Issue 4, 2009, Pages 368-372
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Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens
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Author keywords
Electron spectroscopy; Immersion lens; Low voltage scanning electron microscopy; Secondary electron image
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Indexed keywords
CONTRAST CHANGES;
ELECTROSTATIC FIELDS;
ENERGY DISTRIBUTIONS;
IMMERSION LENS;
LOW-PASS FILTERS;
LOW-VOLTAGE SCANNING ELECTRON MICROSCOPY;
SCANNING ELECTRON MICROSCOPES;
SECONDARY ELECTRON IMAGE;
SECONDARY ELECTRONS;
SEM;
SEM IMAGES;
ATOMS;
DETECTORS;
ELECTRON MICROSCOPES;
ELECTRON OPTICS;
ELECTRON SPECTROSCOPY;
ELECTRONS;
LENSES;
OPTICAL INSTRUMENTS;
SCANNING;
SCANNING ELECTRON MICROSCOPY;
SECONDARY EMISSION;
SELF ASSEMBLED MONOLAYERS;
SPONTANEOUS EMISSION;
ELECTROSTATIC LENSES;
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EID: 61849162789
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ultramic.2009.01.005 Document Type: Article |
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Times cited : (45)
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References (17)
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