Evaluating SEM performance from the contrast transfer function

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7638, Issue , 2010, Pages

  Joy, David C ^a,b   Michael, Joseph ^c   Griffin, Brendan ^a,d  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Fourier analysis; metrology; resolution; SEM; signal to noise

Indexed keywords

CONTRAST TRANSFER FUNCTION; DIAGNOSTIC CAPABILITIES; FOURIER SPECTRA; IMAGING CAPABILITIES; IMAGING PERFORMANCE; NOISE LEVELS; PUBLIC DOMAIN SOFTWARES; SCANNING ELECTRON MICROSCOPES; SIGNAL COMPONENTS; SIGNAL TO NOISE; SPATIAL FREQUENCY; SPATIAL RESOLUTION; STANDARD PRACTICES; TRANSMISSION ELECTRON MICROSCOPE;

ELECTRON MICROSCOPES; FOURIER ANALYSIS; MEASUREMENTS; PROCESS CONTROL; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; UNITS OF MEASUREMENT;

TRANSFER FUNCTIONS;

EID: 79958021849     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.846455     Document Type: Conference Paper

References (6)

1. Lorusso G F and Joy D C, "Experimental resolution measurement in critical dimension scanning electron microscope metrology", SCANNING 25, 175-180 (2003)
2. Maunly, A. & Fanget, G.L. (1999) A contribution to the evaluation of SEM resolution. SPIE Proc. Microlithogr. 3332, 71-80.
3. Kim J, Jalhadi K, Deo S, Lee S-Y, and Joy DC, "Tools to measure CD-SEM performance", in Metrology, Inspection and Process Control for MicroLithography XX, ed Chas. N. Archie, Proc. of SPIE 6152, OT1 - OT9, (2006),
4. van Lindt J H, MacWilliams F J, Sloane N J A, "Pseudo Random Arrays", SIAM J. Appl. Mathematics 36, 62-72, (1979)
5. Joy D C, "SMART - a program to measure SEM resolution and imaging performance", J. of Microscopy, 208, 24-34, (2002)
6. IMAGE Java is a public domain program, written by Wayne Rasband (NIH). The most current build can be downloaded from http://rsb.ifo.nih.gov/ij/ The SMART-J plug-in is available free from David Joy (djoy@utk.edu)