Rapid ultraviolet-curing of epoxy siloxane films

Materials Chemistry and Physics

Volumn 129, Issue 3, 2011, Pages 678-682

  Wang, Pei I ^a   Bult, Justin ^a   Ghoshal, Rajat ^b   Ghoshal, Ram ^b   Lu, Toh Ming ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b Polyset Co Inc   (United States)

Author keywords

Epoxy siloxane; Imprint lithography; Nanoidentation; UV curable polymer

Indexed keywords

DIELECTRIC STRENGTHS; EPOXY SILOXANE; FUNCTIONAL DEVICES; IMPRINT LITHOGRAPHY; NANO-IDENTATION; NANO-IMPRINTING; RAPID FABRICATION; REDUCED MODULUS; ULTRAVIOLET CURABLE; ULTRAVIOLET-CURING; UV CURABLE POLYMER; UV DOSAGE;

CURING; MECHANICAL PROPERTIES; NANOINDENTATION; POLYMERS;

POLYMER FILMS;

EID: 79960476458     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2011.05.007     Document Type: Article

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