A CAD model for creep behavior of RF-MEMS varactors and circuits

IEEE Transactions on Microwave Theory and Techniques

Volumn 59, Issue 7, 2011, Pages 1761-1768

  Hsu, Hao Han ^a   Peroulis, Dimitrios ^a  

^a Purdue University   (United States)

Author keywords

Computer aided design (CAD) model; creep; nickel; RF microelectromechanical systems (RF MEMS); viscoelasticity

Indexed keywords

ADVANCED DESIGN SYSTEM; AGILENT; BIAS CONDITIONS; BIAS SIGNAL; CAD MODELS; COMPUTER AIDED DESIGN MODELS; CONSTANT LOADING; CREEP BEHAVIORS; LONG-TERM BEHAVIOR; RF MICROELECTROMECHANICAL SYSTEMS; RF MICROELECTROMECHANICAL SYSTEMS (RF MEMS); RF-CIRCUITS; RF-MEMS; SAWTOOTH WAVEFORM; TUNABLE RESONATORS; WAVE FORMS; WAVEGUIDE RESONATORS;

COMPOSITE MICROMECHANICS; COPLANAR WAVEGUIDES; CREEP; MATHEMATICAL MODELS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PHASE SHIFT; PHASE SHIFTERS; RESONATORS; SCATTERING PARAMETERS; VARACTORS;

COMPUTER AIDED DESIGN;

EID: 79960433364     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2011.2138154     Document Type: Article

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