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Volumn 657, Issue , 2001, Pages
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Anelastic creep phenomena in thin metal plated cantilevers for MEMS
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACCELEROMETERS;
ANNEALING;
CREEP;
ELECTRIC POTENTIAL;
ELECTRODES;
ELECTROPLATING;
MICROMACHINING;
SUBSTRATES;
THIN FILMS;
THIN METAL PLATED CANTILEVERS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0035556417
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (22)
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References (5)
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