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Volumn 657, Issue , 2001, Pages

Anelastic creep phenomena in thin metal plated cantilevers for MEMS

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ANNEALING; CREEP; ELECTRIC POTENTIAL; ELECTRODES; ELECTROPLATING; MICROMACHINING; SUBSTRATES; THIN FILMS;

EID: 0035556417     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (22)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.