A viscoelastic-aware experimentally-derived model for analog RF MEMS varactors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 783-786

  Hsu, Hao Han ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS CONDITIONS; ELECTROMECHANICAL BEHAVIOR; EXPERIMENTAL SETUP; RF-MEMS; SPRING CONSTANTS; TUNING RANGES; VISCOELASTIC EFFECTS;

MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING;

VARACTORS;

EID: 77952767725     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442289     Document Type: Conference Paper

References (7)

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