Contact materials and reliability for high power RF-MEMS switches

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 231-234

  Kwon, Hyouk ^a,b   Choi, Dong June ^a   Park, Jae Hyoung ^c   Lee, Hee Chul ^a   Park, Yong Hee ^a   Kim, Yong Dae ^a   Nam, Hyo Jin ^a   Joo, Young Chang ^b   Bu, Jong Uk ^d  

^a LG Electronics Inc   (South Korea)

^b Seoul National University   (South Korea)

^c Ewha Womans University   (South Korea)

^d SenPlus Inc

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; CONTACTS (FLUID MECHANICS); DC GENERATORS; DISSIMILAR MATERIALS; ELECTRIC CONTACTS; ELECTRIC SWITCHES; IRIDIUM; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALLIC COMPOUNDS; PLATINUM; PLATINUM ALLOYS; REACTIVE ION ETCHING; THICK FILMS;

CONTACT MATERIALS; CONTACT MEASUREMENTS; CONTACT PHENOMENA; ELECTRICAL CONTACTS; HIGH CURRENTS; HIGH POWERS; INTERNATIONAL CONFERENCES; MEMS SWITCHES; MICRO-ELECTRO MECHANICAL SYSTEMS; RF-MEMS SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 52249118746     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. G.M.Rebeiz, and J.B.Muldavin, "RF MEMS switches and switch circuits", IEEE Microwave magazine, p59-71 (2001)
2. S.T.Patten, and J.S.Zabinski, "Fundamental studies of Au contacts in MEMS RF switches", Tribology Letter, 18, No.2, p215-230 (2005)
3. R.A.Coutu Jr., P.E.Kladitis, R.Cortez, R.E.Strawser, and R.L.Crane, "Selecting metal alloy electric contact materials for MEMS switches", J. Micromech. and Microeng., 14, p1157-1164 (2004)
4. J.Schimkat, "Contact measurements providing basic design data for microrelay actuators", Sensors and Actuators, 73, p138-143 (1999)
5. th IEEE international conference on MEMS 2006, Jan., p230-233
6. S.Majumder, J.Lampen, R.Morrison, and J.Maciel, "MEMS switches", IEEE Instruments & Measurement Magazine, March 2003, p12-15
7. th Holm conference on Electrical contacts, 2004, p214-221
8. T.B.Massalski and H. Okamoto, Binary Alloy Phase Diagrams (1990)
9. R.Holm, Electric contacts : Theory and Applications (1969)
10. Paul G. Slade, Electrical contacts principles and applications (1999)
11. D.Hyman and M.Mehregany, "Contact physics of gold microcontacts for MEMS switches", IEEE transactions on components and packaging technology, 22, No.3, p357-p364(1999)
12. H.-C. Lee, J.-Y. Park, and J.-U. Bu, "Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation", Microwave and Wireless Components Letters, 15, 4, p202-204 (2005)